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excimer laser pulse shape

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

Laser Focus World - November 2017

Laser Focus World - November 2017

…the excimer laser in a process called excimer laser annealing (ELA; see Fig. 3). Specifically, a pulsed excimer laser line beam is scanned over the a-Si film, which efficiently absorbs the 308 nm excimer output. This high absorption, combined with the high pulse energy of the excimer laser, makes…

Laser Focus World - August 2016

Laser Focus World - August 2016

…that could deliver these kinds of benefits. The ideal laser for LTPS annealing produces high energy and UV pulses, and has an output beam conducive for shaping into a long, thin line. But this technology congruence for our particular excimer lasers was just the starting point. In fact, it took over…

Laser Focus World - August 2016

Laser Focus World - August 2016

…the limit of CO2 lasers, which can deliver diameters down to about 70 µm. In particular, we believed FIGURE 2. The evolving needs of the flat panel display market are met with a scalable Line Beam Annealing System, where multiple excimer laser beams are combined and then shaped to form a single…

Laser Focus World - August 2016

Laser Focus World - August 2016

…the limit of CO2 lasers, which can deliver diameters down to about 70 µm. In particular, we believed FIGURE 2. The evolving needs of the flat panel display market are met with a scalable Line Beam Annealing System, where multiple excimer laser beams are combined and then shaped to form a single…

Laser Focus World - February 2016

Laser Focus World - February 2016

…accuracy WritingauniformFBGwithacenter-wavelength transmission reduction of 20-50 dB might require as many as 1000 of the 5 mJ pulses from the laser. As this laser operates at 500 Hz, this means an exposure time of 2 s. Chirped FBGs (in which the grating period changes along the length of the…

Laser Focus World - February 2016

Laser Focus World - February 2016

…accuracy WritingauniformFBGwithacenter-wavelength transmission reduction of 20-50 dB might require as many as 1000 of the 5 mJ pulses from the laser. As this laser operates at 500 Hz, this means an exposure time of 2 s. Chirped FBGs (in which the grating period changes along the length of the…

Laser Focus World - February 2016

Laser Focus World - February 2016

…accuracy WritingauniformFBGwithacenter-wavelength transmission reduction of 20-50 dB might require as many as 1000 of the 5 mJ pulses from the laser. As this laser operates at 500 Hz, this means an exposure time of 2 s. Chirped FBGs (in which the grating period changes along the length of the…

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