…the pulsing excimer laser line beam field in one or two scans,
it is possible to cover an entire Gen 4.5 substrate panel
Figure 5. Sketch of the optical line beam delivery system.
Table 2. Processing metrics for the Gen 4.5
substrate LLO in one scan and two scans.
reliability levels, gas lifetimes, and laser
tube lifetimes across the entire excimer
The ExciStar family of excimer lasers
from Coherent continues to be the
dominant choice of refractive surgery
builders systems. These lasers made
…400 pulses 900 pulses
Pulse Rate 10Hz 20Hz
Throughput >60 wafers/hr >60 wafers/hr
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family…
…biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam
Systems which deliver the high energy pulses in a long…
…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
…the excimer laser
in a process called excimer laser annealing (ELA; see Fig. 3). Specifically, a pulsed
excimer laser line beam is scanned over
the a-Si film, which efficiently absorbs the
308 nm excimer output.
This high absorption, combined with
the high pulse energy…
…deliver these kinds of benefits.
The ideal laser for LTPS annealing produces high energy and UV pulses, and has
an output beam conducive for shaping
into a long, thin line. But this technology
congruence for our particular excimer lasers was just the starting point. In fact, it…
…using a 193 nm excimer laser.
Figure 3. Bandgap of GaN, AlN and sapphire. The photon energy of the excimer laser is referenced in blue.
Using short laser pulses minimizes heat diffusion and reduces the stress on the device layer.
The typical excimer laser pulse length of 10-20…
…WritingauniformFBGwithacenter-wavelength transmission reduction of 20-50 dB
might require as many as 1000 of the 5
mJ pulses from the laser. As this laser operates at 500 Hz, this means an exposure
time of 2 s. Chirped FBGs (in which the
grating period changes along the length…
Of currently available ultraviolet laser
technologies, pulsed excimer lasers offer
the highest pulse energy (up to 2 J). Plus,
the large rectangular beam produced by
excimer lasers can easily be shaped and
homogenized to match the geometry of
…energy source may be a lamp or, more commonly, another laser. Electrical pumping can be via a DC current (as in laser diodes), an electrical discharge (noble gas lasers and excimer lasers) or a radio-frequency discharge (some CO2 lasers). In a conventional (incoherent) light source like a lightbulb,…
…key performance characteristics, like pulse-to-pulse
stability. It also provides a unique flexibility in terms of pulsing and temporal
Excimer laser annealing system
with 1300-mm line beam length
Each individual VYPER oscillator can
deliver a total power…
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