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excimer laser

Excimer laser technology trends

Excimer laser technology trends

…repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses. PLD is one of the rate limiting…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse stability as well as in laser output power achieved over the last two…

Excimer laser technology trends

Excimer laser technology trends

…lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse stability as well as in laser output power achieved over the last two…

Excimer laser technology trends

Excimer laser technology trends

…lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse stability as well as in laser output power achieved over the last two…

Excimer laser technology trends

Excimer laser technology trends

…lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse stability as well as in laser output power achieved over the last two…

Excimer lasers for thin films

Excimer lasers for thin films

…well as recent technical advances in excimer lasers for thin film applications are shown in this paper. Keywords: Excimer laser, UV light, pulsed laser deposition, thin films 1. INTRODUCTION Pulsed excimer lasers are the strongest and most efficient laser sources in the ultraviolet spectral region.…

Excimer lasers for thin films

Excimer lasers for thin films

excimer laser based ablation systems as well as of the high depth resolution reaching down to 0.1 µm, excimer lasers are extensively used in high-precision marking, surface treatment, micro patterning and micromachining to name but a few. Due to the unique spectral properties of excimer lasers,

Excimer lasers for thin films

Excimer lasers for thin films

…energy of 200 mJ over more than 40 million laser pulses at a wavelength of 193 nm achieved with the advanced LPX laser design. 4. OVERVIEW OF LASER PARAMETERS Table 1 gives a concise overview of the main specifications of the COMPex and LPX excimer lasers for a wavelength of 193 nm. COMPex LPX…

Excimer lasers for thin films

Excimer lasers for thin films

…of a COMPex with smooth ceramic preionization measured over 1000 laser pulses at a wavelength of 248 nm. A typical standard deviation sigma of ca. 1 % is achieved at high pulse energies. 3.2 Beam Homogeneity Excimer lasers have typically a rectangular beam profile, whereas the long axis has…

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