Figure 6. Output power evolution of 308 nm excimer laser systems.
manufacturing via PLD demands exactly the opposite from the
excimer laser. The following section will look into the PLD
excimer laser requirements for large-scale production.
3. Excimer lasers in…
2 R. Delmdahl et al.
Figure 1. Fabrication scheme of flexible displays by means of excimer LLO.
Figure 2. Schematics of the LLO characteristics using short and
about 100 nm, with the typical polymer layer thicknesses
extending from some ten to some hundred…
COHERENT 124 Die Marktdurchdringung der Kohlefaser-Verbund-Werkstoffe in den entsprechenden Industriebereichen vor allem im Auto-mobilbau, Flugzeugbau und Windenergieanlagenbau steigt unaufhörlich. Bereits heute übersteigt der Anteil von Faser-Verbundwerkstoffen in der neuesten Generation von…
and crystallizes right behind the laser line the
polycrystalline silicon layer. This recrystallization
process is known as excimer laser annealing.
The throughput of a Vyper/LineBeam-system is
about 15,000 square meters of polysilicon per
month - equivalent to…
Cover Story www.laserfocusworld.com.cn Laser Focus World China 14 Mar/ Apr 2018 Lambda Physik 40 UV AMLCD /Ludolf HerbstCoherent Laser Systems GmbH 1ELA a-Si poly-Si 2 LineBeam 1000/TwinVYPER LCD AMOLED
…seconds for each eye.
All these advances are part of the
complete maturation of ArF excimer
technology. Historically, ArF has always been the most challenging of the
commonly used excimer output wavelengths, because of the combination of
deep UV photons and fluorine gas -…
EXCIMER LASERS & UV OPTICAL SYSTEMS 2019 Product Catalog
…Microelectronics Flat panel display CO2
Advanced packaging and CO2
Semiconductor front-end CO2
Materials processing Metal cutting,…
The Coherent Excimer Business Unit, which began as Lambda Physik, has
a 40 year history in producing excimer lasers for industrial and scientific
applications. Here we interview company General Manager Richard Waldermann on the current state of excimer…
VYPER Very High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which…
…life than excimers. Laserassisted in situ keratomileusis (LASIK), photolithography, and display production are three primary applications that illustrate the unique properties of the excimer laser that continue to ensure its legacy as a key enabling technology. Unique output, unique benefits Excimer…
…. . . . . Flat panel display CO, CO2
Advanced packaging and CO, CO2
Semiconductor front-end CO2
Materials processing . . . . . . . . .…
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