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Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…coated conductor manufacturing [9]. High-power excimer lasers provide sufficient output energy in order to be distributed over 6 or more laser spots at typically employed fluences of some J cm-2 . Figure 8 shows a gas life run of a 308 nm excimer laser stabilized at 1 J pulse energy at 500 Hz pulse…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

2 R. Delmdahl et al. Figure 1. Fabrication scheme of flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

2 R. Delmdahl et al. Figure 1. Fabrication scheme of flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

2 R. Delmdahl et al. Figure 1. Fabrication scheme of flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a…

Excimer laser technology trends

Excimer laser technology trends

…034004 R Delmdahl and R P¨atzel Figure 7. Evolution of the dynamic gas lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse…

Excimer laser technology trends

Excimer laser technology trends

…034004 R Delmdahl and R P¨atzel Figure 7. Evolution of the dynamic gas lifetime and output energy stability of 308 nm excimer lasers. For reliable, high power industrial excimer lasers, the high pressure gas discharge is the only suitable excitation technique. The improvements in pulse-to-pulse…

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