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excimer

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…coated conductor manufacturing [9]. High-power excimer lasers provide sufficient output energy in order to be distributed over 6 or more laser spots at typically employed fluences of some J cm-2 . Figure 8 shows a gas life run of a 308 nm excimer laser stabilized at 1 J pulse energy at 500 Hz pulse…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…coated conductor manufacturing [9]. High-power excimer lasers provide sufficient output energy in order to be distributed over 6 or more laser spots at typically employed fluences of some J cm-2 . Figure 8 shows a gas life run of a 308 nm excimer laser stabilized at 1 J pulse energy at 500 Hz pulse…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

Excimer laser technology trends

Excimer laser technology trends

…reproducibility of the functional layer. Excimer lasers as direct UV emitters intrinsically exhibit a much better pulse-to-pulse stability than frequency-converted UV lasers. Mainly as a result of introducing ceramic preionization technology, excimer lasers provide superior pulse-to-pulse stability.…

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