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Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

Application Report: EXCIMER LASER CLEANING FOR SENSITIVE SURFACES Ongoing advances in excimer laser technology have borne a new generation of high repetition rate ultraviolet (UV) lasers that offer superior performance and lend themselves to a host of cleaning operations. Excimer lasers offer…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…in microelectronics applications are continuously being downscaled. Excimer lasers provide the 308 nm wavelength and short pulse duration required for highly localized energy coupling. The high output power of excimer lasers enables a large processing footprint and the high-throughput rates…

Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…coated conductor manufacturing [9]. High-power excimer lasers provide sufficient output energy in order to be distributed over 6 or more laser spots at typically employed fluences of some J cm-2 . Figure 8 shows a gas life run of a 308 nm excimer laser stabilized at 1 J pulse energy at 500 Hz pulse…

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