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excimer

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…close All Excimer Lasers and Applications Products UV Processing Solutions LineBeam COMPex ExciStar XS IndyStar LAMBDA SX LEAP LPXpro GeoLasHD UV Optical Components UVblade VarioLas Family VYPER Excimer Lasers and Applications Literature Excimer Catalog Application Report: Excimer Laser Cleaning…

COMPex

COMPex

COMPex The Excimer Laser – Market Leading UV-Technology Contact Us About This Product close PRICE HERE The Excimer Laser – Market Leading UV-Technology COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in…

Excimer Laser EnergyMax Sensors

Excimer Laser EnergyMax Sensors

…cable with bend and strain relief protects against rough handling Coherent Excimer Laser EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. Excimer Laser EnergyMax Series sensors feature high accuracy and large active area (up…

Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

Application Report: EXCIMER LASER CLEANING FOR SENSITIVE SURFACES Ongoing advances in excimer laser technology have borne a new generation of high repetition rate ultraviolet (UV) lasers that offer superior performance and lend themselves to a host of cleaning operations. Excimer lasers offer…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

VYPER

VYPER

VYPER Multiple beam, excimer lasers that feature kilo-watts of UV power and pulse energies of 2 or 4 Joules at 600 Hz repetition rate. Contact Us About This Product close PRICE HERE The VYPER Series The VYPER is a multiple beam, very high power excimer laser providing the highest energy stability at…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…in microelectronics applications are continuously being downscaled. Excimer lasers provide the 308 nm wavelength and short pulse duration required for highly localized energy coupling. The high output power of excimer lasers enables a large processing footprint and the high-throughput rates…

Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

Excimer laser technology trends

Excimer laser technology trends

…95% uptime, using the 600 Hz repetition rate, a 540 W high power production excimer laser delivers about 10 billion laser pulses over the course of 5500 h per year. The running costs of a 308 nm high power excimer laser including gas consumption amount to typically 50$ per million laser pulses.…

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