1 - 10 of 28 Search Results for excistar s-industrial
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1.
AR PSM 2
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…of accuracy. Figure 1: Complex degree of coherence designed for large shears ExciStar S-Industrial Heavy Duty Performance - Highest Efficiency Why Excimer Laser? · Small Wavelength (193nm) · High Peak Power Why ExciStar S-Industrial? · High Repetition Rate (up to 1000Hz) · 90% Duty Cycle (at 1000Hz…
Related Searches: diffractive | excistar
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3.
LTJ 0106 MaskQualific
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…highpulse-to-pulseenergystability(<0.3%). Because of the high repetition rate, and the fact that equipment downtime is extraordiFIGURE 1: The ExciStar S-Industrial excimer laser delivers up to 4 Watts of average power at a 500 Hz repetition rate, with a 400 pm linewidth. The cost of this laser is less than…
Related Searches: excistar | mtbf
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4.
Kompakte Fluorlaser Laser 2004
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…aufwändig und oft nur an Instituten im Einsatz. Das Institut für Physikalische Hochtechnologie (IPHT) in Jena, führt mit einem TuiLaser ,,ExciStar S-Industrial" Transmissions- und direkte Absorptionsmessungen bei 157 nm durch. Bedingt durch die Notwendigkeit der Herstellung immer hochwertigerer optischer…
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5.
EL 46-47 2
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46 E L Unternehmen Puls-Milliardär Kompakte Excimerlaser mit hoher Röhren- und Fensterlebensdauer Kleines Bild links: Der neue ExciStar S-Industrial von TuiLaser. Grafik oben links: Dynamische Gaslebensdauer: 8mJ @ 300 Hz über 20 Millionen Pulse Grafik oben rechts: Langzeittest der 193 nmVersion:…
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7.
19816 SD EL 4 01 2
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PULSE BILLIONAIRE Compact excimer lasers with long life tubes and windows. Small figure left: The new ExciStar S-Industrial from TuiLaser Graph top left: Dynamic life time of gas: 8 mJ @ 300 Hz More than 20 million pulses Graph top right: Long term testing of the 193 nm version: 8 mJ @ 300 Hz over 1…
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8.
19816_SD EL 4 01
(PAGE 2 OF 2)
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…which made the company known in the market
place.
The latest child, created by the 40 heads strong development team,
is the ExciStar S-Industrial, which is available in 193 nm(ArF) and in
248 nm (KrF). The main aim for the design of this beam source was a
significant improvement…
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9.
Applikationsreport0103.qxd
(PAGE 2 OF 3)
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…suitable trigger input to the laser
(typically TTL) must be available.
A diffractive shearing interferometer based
on a TuiLaser ExciStar S-Industrial excimer
laser implements a stable common-path
design, using only a minimum number of
additional optical components compared to…
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10.
untitled
(PAGE 2 OF 2)
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…As a result, a total pulse count lifetime of one billion
pulses is acceptable.
Laser design
Coherent TuiLaser developed the ExciStar SIndustrial specifically to meet the needs of
photomask aerial imaging (Fig. 1). The laser
delivers up to 4 Watts of average power at a
500…
Related Searches: mtbf
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