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excistar xs 200

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BraggStar M >20 Hz Halogen RareHe Ne He · ExciStar XS Series · IndyStar · COMPexPro · BraggStar M · LPXpro
*(required for 157 nm and 193 nm) Premix He N2
* N2
* L A S E R · ExciStar XS · COMPexPro <20 Hz · BraggStar M <20 Hz…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BraggStar M >20 Hz Halogen RareHe Ne He · ExciStar XS Series · IndyStar · COMPexPro · BraggStar M · LPXpro
*(required for 157 nm and 193 nm) Premix He N2
* N2
* L A S E R · ExciStar XS · COMPexPro <20 Hz · BraggStar M <20 Hz…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…BraggStar M >20 Hz Halogen RareHe Ne He · ExciStar XS Series · IndyStar · COMPexPro · BraggStar M · LPXpro
*(required for 157 nm and 193 nm) Premix He N2
* N2
* L A S E R · ExciStar XS · COMPexPro <20 Hz · BraggStar M <20 Hz…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…BraggStar M >20 Hz Halogen RareHe Ne He · ExciStar XS Series · IndyStar · COMPexPro · BraggStar M · LPXpro
*(required for 157 nm and 193 nm) Premix He N2
* N2
* L A S E R · ExciStar XS · COMPexPro <20 Hz · BraggStar M <20 Hz…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BraggStar M >20 Hz Halogen RareHe Ne He · ExciStar XS Series · IndyStar · COMPexPro · BraggStar M · LPXpro
*(required for 157 nm and 193 nm) Premix He N2
* N2
* L A S E R · ExciStar XS · COMPexPro <20 Hz · BraggStar M <20 Hz…

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