…Field Geometry Square Square Line Substrate Field Size (mm 2) 2 x 2 2 x 2 50 x 0.6 Optical Resolution (μm) 30 5 - Working Distance (mm) 50 50 100 Max. Repetition Rate (Hz) 100 100 100 Max. Energy Density (mJ/cm 2) at 193 nm 1000 1000 230 Max. Energy Density (mJ/cm 2) at 248 nm 3500 3500 600 Max.…
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