1 - 10 of 15 Search Results for govorkov
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3.
ExcimerLasersforSuper-HighNA193nmLithographyRev2
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Excimer Lasers for Super-High NA 193 nm Lithography Rainer Paetzel, Hans Stephan Albrecht, Peter Lokai, Wolfgang Zschocke, Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte Lambda Physik AG, Hans-Boeckler-Straße 12, D-37079 Goettingen, Germany Tel: +49 551 69380 Fax: ...
Related Searches: 193 nm laser | ldu | novaline | a4003
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pdf_225
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1 chamber is a central technology step to meet this task. But the development engineer's homework has to be done: Planar laser induced fluorescence (PLIF) helps an engineer to inspect fuel injection and the mixing with the in-cylinder air until combustion consumes the fuel. If this mixture formation ...
Related Searches: trepanning head | handbook
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pdf_225
(PAGE 5 OF 6)
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... Small Holes", Modern Machine Shop, June 2002. [8] C. Sommers, Non-Traditional Machining Handbook, Advance Publishing Inc., 1999. [9] S.V. Govorkov, E.V. Slobodtchikov, A.O. Wiessner, D. Basting, "High Accuracy Microdrilling of Steel with Solid-State UV Laser at 10 mm/sec Rate", in Proc ...
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pdf_126
(PAGE 6 OF 12)
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... Shop Testing, 2nd Ed. Wiley & Sons, (1993) [8] K. Vogler, I. Klaft, F. Voss, I. Bragin, E. Bergmann, T. Nagy, N. Niemoeller, R. Paetzel, S. Govorkov, G. Hua, Advanced F2-lasers for 157 nm lithography, Microlithography XIV, Proceedings of SPIE Vol. 4346, pp. 1175-1182 (2001) Fig. 5: Comparison between ...
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8.
pdf_126
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1 diffraction. This technique has been employed for nanolithography [2], ablation [3], material etching [4] and for local reduction of oxides [5]. Its main disadvantage is the low throughput that can be achieved in a fabrication process, even when bundles of fibers are used. Presently, we are investigating ...
Related Searches: excimer laser | highlights
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9.
pdf_128
(PAGE 3 OF 8)
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... of the sample a) 50 µm, b) 370 µm and c) 870 µm. a) b) c) High Accuracy Microdrilling of Steel with Solid-State UV Laser at 10 mm/sec Rate Sergei V. Govorkov, Evgueni V. Slobodtchikov, Alexander O. Wiessner, Dirk Basting Lambda Physik USA, Ft. Lauderdale, FL
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