1 - 10 of 70 Search Results for halogen
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2.
20390-141
(PAGE 2 OF 4)
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…development
The excimer laser has found its place in
industry and medicine in large part
because of the use of ceramic materials
as halogen and UV-resistant insulators.
In combination with the corona primer
ignition, lasers can now be operated
with only a 2-liter gas volume…
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3.
HighRep-RateExcimerLasersforMicromachingRev2.pdf
(PAGE 6 OF 9)
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…The reason for decreasing energy is the slowly decreasing halogen concentration, even in well
passivated systems. Unfortunately the beam geometry does also change with increasing HV. Therefore on the fly gas
actions, such as Halogen Injections (HI) and Partial Gas Replacements (PGR), have been…
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5.
Excimer lasers for thin films
(PAGE 5 OF 6)
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halogen injections have been introduced for excimer laser systems. Lambda Physik has optimized the halogen injections
in a way that only very small quantities of halogen are injected when a given high voltage level is reached. This keeps
the beam properties within the specified range during…
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8.
300WXeClExcimerLaserAnnealingRev2.pdf
(PAGE 4 OF 8)
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…The reason for decreasing energy is the slowly decreasing halogen concentration, even in well
passivated systems. Unfortunately the beam geometry does also change with increasing HV. Therefore on the fly gas
actions, such as halogen injections (HI) and partial gas replacements (PGR), have been…
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10.
20390-141
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Best match in this PDF
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All matches in this PDF
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…Compact laser development The excimer laser has found its place in industry and medicine in large part because of the use of ceramic materials as halogen and UV-resistant insulators. In combination with the corona primer ignition, lasers can now be operated with only a 2-liter gas volume and more than…
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