1 - 8 of 8 Search Results for halogen filter set
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6.
OLEReprintCoherentSep06
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... gas lasers andisalsoduetotheunusualrequirements forpumpingthesemedia. An excimer plasma discharge tube uses a mixture of three different gases: a halogen (eitherF2 orHCl),araregas(suchasAr,Kror Xe)anda"bath"gas(NeorHe).Theplasma tubeisfilledtoamuchhigherpressure(typically around 400kPa) than ...
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7.
LTJ_0106_MaskQualific
(PAGE 2 OF 2)
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... reduces the amount of contaminants created, thus increasing gas and optics lifetimes. The laser also uses an enhanced, two-stage internal filtering system to eliminate the small amounts of contaminants that are inevitably created. In addition, pure, particle-free gas is blown over the optics to prevent ...
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