1 - 10 of 26 Search Results for halogen gas filter
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1.
LTJ_Excimer_0607
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... trends. Excimers - Unique Benefits and Unique Challenges in an excimer laser, a plasma discharge tube is filled with a mixture of three different gases: a halogen (either F2 or HCl), a rare gas (such as kr or Xe) and a "bath" gas (Ne or He). The excimer plasma tube operates at a much higher ...
Related Searches: johannes junger | ltps
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2.
REL_TuiLaserReprint
(PAGE 3 OF 6)
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Excimers arepulsed gas lasers that deliver high pulse energies and high average output at ultraviolet and deep-ultraviolet wavelengths. As a result, the list of applications for excimer lasers continues to expand, in contrast to other types of gas lasers. Standout applications include silicon annealing ...
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4.
LTJ_Excimer_0607
(PAGE 2 OF 3)
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... , high reliability excimers to support microlithography. This includes research into materials, cleaning methods, smoother types of discharge, gas circulation and cleaning, and long-life cavity optics. in terms of pulse repetition rate for example, one of the limiting factors is gas circulation. Typically ...
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7.
BraggStar Industrial (BSI) Series
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... the requirements of a Semi-S2-Standard. In order to achieve the highest uptime the LDU (Laser Discharge Unit = Laser tube + solid state switch + halogen filter) is placed on a chamber slide, which can be easily removed in case of a consumable exchange. Improved Spatial and temporal coherence In comparison ...
Related Searches: braggstar
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10.
OLEReprintCoherentSep06
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... laser basics Excimersaregasphaselasers,however,their construction,operationandoutputcharacteristicsdifferquitesignificantlyfromthatof most other gas lasers. This is primarily becausetheinherentgainof excimermedia is so much higher than for other gas lasers andisalsoduetotheunusualrequirements forpumpingthesemedia ...
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