1 - 10 of 12 Search Results for heidelberg
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The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ...
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With a Gaussian power distribution and a beam quality factor of M2 =1.1, the laser beam can be used for nearly diffraction-limited resolution. A pulse peak power in the gigawatt range can be achieved on the sample, using a Lambda Physik DPSS laser with pulse energies in the range of 10 mJ at pulse ...
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6.
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(PAGE 1 OF 8)
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... . Andreas Ostendorf of the Laser Zentrum Hannover described the micromachining of PTFE and fused silica, while Peter Hess of the University of Heidelberg discussed studies of the photodesorption of hydrogen from a silicon surface. The latter work could be applied to resistless photolithography by patterning ...
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7.
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(PAGE 7 OF 12)
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... (1 ×1):H Digitally Controlled F2-Laser Oxidation of H-Terminated Silicon Jochen Lambers and Peter Hess, Institute of Physical Chemistry University of Heidelberg, Germany Fig. 1: Experimental setup with the F2-laser beam and the IR beam of the FTIR spectrometer traversing the UHV chamber that contains ...
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8.
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(PAGE 9 OF 12)
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... support of this work by Heidelberger Druckmaschinen AG is gratefully acknowledged. Peter Hess Institute of Physical Chemistry University of Heidelberg Im Neuenheimer Feld 253 69120 Heidelberg, Germany Email: peter.hess@urz.uni-heidelberg.de References [1] Fundamental Aspects of Silicon Oxidation, Y ...
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9.
pdf_129
(PAGE 5 OF 8)
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... , P. Hess, Phys.Rev.Lett. 81 (1998) 645 [3] A. Pusel, P. Hess, Surf.Sci. 433-435 (1999) 74 Peter Hess Institute of Physical Chemistry University of Heidelberg, Germany
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10.
AnalyticalArticleRev2
(PAGE 5 OF 5)
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... same customer demands as manufacturers of other analytical instruments: smaller, more economical and easier-to-use instruments. Leica Microsystems Heidelberg GmbH of Mannheim, Germany, which makes confocal microscopes, discovered that, for some applications, near-UV solid-state lasers offer the combination ...
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