1 - 10 of 342 Search Results for homogenizer
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2.
5X-system-description
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…subsystems are manufactured for integration into workstations. Configurations consist of an attenuator module, deflection mirrors, telescope lenses, homogenizer optics, field lenses and a projection lens (imaging lens). Each system's design can also include observation optics with CCD cameras, an optional…
Related Searches: telescope
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3.
ICALEO
(PAGE 5 OF 10)
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…more optical elements
must be added which homogenize the raw beam and illuminate the exact mask pattern. The
principle of a high efficient homogenizer built by MicroLas
is shown in Figure 4.
Figure 4: Principle of Beam Homogenizer using crossed arrays of cylindrical lenses
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5.
ExcimerProductGuide2008.qxd
(PAGE 42 OF 52)
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…
UVOpticalSystems
Components
UV Optical Systems
Homogenizers
Homogenizer 5x5 Homogenizer 10x10 Homogenizer 20x20
Homogenized Field Size (mm) 5 x 5 10 x 10 20 x 20
Zoom ±10% ±10% ±10%
Homogeneity <±5% <±5% <±5%
Field Position Entrance aperture Entrance aperture…
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8.
ExcimerProductGuide2008.qxd
(PAGE 37 OF 52)
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…unmatched energy densities
ranging from 1 J/cm2 up to 45 J/cm2 for material-independent
solid sampling. GeoLasPro utilizes sophisticated homogenizing optics to ensure accurate and shallow depth control,
along with flat-bottom craters. Using 193 nm wavelength in
solid sampling produces…
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