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1.  5X Optical Systems ... Ablation Applications Manufactured for integration into workstations, and include an attenuator module, deflection mirrors, telescope lenses, homogenizer optics, field lenses, and a projection lens. Superior Reliability & Performance Lasers and Laser-based Systems Laser Measurement and Control Precision ... Related Searches: microlas

2.    pdf_119 Best match in this PDF  |  All matches in this PDF ... to 1000 mJ pulse energy, and 300 W of power. Such a system can achieve efficient crystallization without wasting the energy in the base substrate. Homogenizer optics process the beam to provide uniform illumination to a 20-mm x 70-mm mask pattern. A diffraction-limited projection system creates an image ... Related Searches: thin film | excimer laser annealing | uv lasers | beam homogenizer

3.    ComparisonExcimerLaserSolidStateLaserRev2 Best match in this PDF  |  All matches in this PDF ... to be adapted precisely to the processing task. In order to increase the utilization of the excimer beam more optical elements must be added which homogenize the raw beam and illuminate the exact mask pattern. The principle of a high efficient homogenizer built by MicroLas is shown in Figure 4. Figure ... Related Searches: excimer laser | 266 nm | laser material interaction | yag laser

4.    300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF ... to your MySPIE ToDo list and approve or disapprove this submission. Figure 1: Principle of excimer laser annealing. The pulsed excimer laser beam is homogenized and shaped to a line and scanned across the surface. Within the laser pulse duration the amorphous silicon layer is rapidly heated and melted ... Related Searches: excimer laser annealing | microlas | laser annealing | beam homogenizer

5.    LTPSWhitePaperFinal_Oct28  (PAGE 10 OF 12) ... : High Resolution (Courtesy of Japan Steel Works). Right: Low Resolution (Lambda Physik). Figure 3: The principle of CrystaLas TS-SLS optics: the homogenized laser beam images the pattern of a mask through a projection lens to the substrate. The pattern is stepped over the panel.

6.    BeamShapingLFW05Rev2 Best match in this PDF  |  All matches in this PDF ... transform excimer-laser beams for applications such as silicon annealing in flat-paneldisplay fabrication and micromachining by photomask writing. Homogenizing and shaping The first elements in a system for transforming excimer output are typically a beam expander and intensity homogenizer. The purpose ... Related Searches: beam shaper | beam homogenizer | beam profiler | top hat

7.    UVBEAM Best match in this PDF  |  All matches in this PDF UV Beam Homogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ... Related Searches: beam homogenizer | microlas | beam profiler | 351nm

8.    MicroLas_brochure Best match in this PDF  |  All matches in this PDF ... thinfilm transistors (TFT) and micromachining, it is critical to deliver a beam with a highly uniform intensity profile. The MicroLas line of beam homogenizers includes patented optical components that can be configured to transform the output of any excimer laser into a uniform intensity beam with ... Related Searches: microlas | geolas | matrix

9.    pdf_127  (PAGE 11 OF 12) ... laser from Lambda Physik. The beams of both lasers had flat-top intensity profiles, in the case of the 193 nm laser provided by a crossed lens array homogenizer delivered by MicroLas. Pulses of both lasers were set to equal fluences (within 20%) and applied alternatively to the samples. The 193 nm system ... Related Searches: compex 110 | geolas

10.    IMID_Korea_2004_17-4_SLS1Rev2 Best match in this PDF  |  All matches in this PDF ... the CrystaLas SLS optics, developed by MicroLas Laser Systems (Germany) is shown in Figure 3. Figure 3: The principle of CrystaLas SLS optics: the homogenized laser beam images the pattern of a mask through a projection lens to the substrate. The pattern is stepped over the panel. Different from the ... Related Searches: beam homogenizer | excimer laser annealing | microlas | camera

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