1 - 10 of 69 Search Results for indystar
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1.
Coherent Inc. IndyStar Series supports 2000Hz repetition rate.
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IndyStar Series Heavy duty performance, and highest efficiency excimer laser. Excimer Lasers Product Catalog 2011 Related Applications . -- Select a Related Application -- Lithography Mask Metrology with Fast UV Excimer Lasers Marking with UV Lasers Micromachining Semiconductor Manufacturing Wire Stripping…
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2.
Datasheet IndyStar 032010
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…mm (10.65 in.) 232.5 mm (9.15 in.) 181.5 mm (7.15 in.) 125.5 mm (4.94 in.) 97.5 mm (3.84 in.) 890 mm (35 in.) 800 mm (31.5 in.) 58.5 mm (2.3 in.) IndyStar High Repetition Rate Excimer Laser Features · Available for repetition rates of 1kHz and 2kHz · Modified platform for updated Semi-S2-certification…
Related Searches: almeta
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3.
ExcimerProductGuide2008.qxd
(PAGE 33 OF 52)
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…ExciStar XS (only air-cooled)
IndyStar
BraggStar Industrial Series
Water Cooling
(water-to-water exchange)
COMPexPro >20 Hz
LPXPro/LPFPro
LAMBDA SX
IndyStar (optional)
Laser Gases
ExciStar XS Series
IndyStar
BraggStar Industrial Series
…
Related Searches: excistar xs
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4.
IndyStar MaskInspection
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…steppers cost over 1 million Euro and are physically cumbersome. The Phame system is built around a smaller excimer laser, the Coherent >IndyStar<. The IndyStar provides the necessary optical output characteristics to duplicate the scanner, but at a fraction of the cost. The primary considerations in selecting…
Related Searches: photolithography
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5.
IndyStar_DS
(PAGE 2 OF 2)
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…High Voltage (V)
PulseEnergy(mJ)
EnergyStability(1sigma,%)
9.0
0
6.0
1.0
2.0
3.0
4.0
5.0
IndyStar 193 2kHz - Energy performance till 10 billion
pulse lifetime
E(U) @ 2.5 billion
E(U) @ 7.5 billion
E(U) @ 10.0 billion
Energy…
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6.
IndyStar_MaskInspection.pdf
(PAGE 4 OF 4)
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…million Euro and
are physically cumbersome. The Phame
system is built around a smaller excimer
laser, the Coherent >IndyStar<. The IndyStar provides the necessary optical output
characteristics to duplicate the scanner,
but at a fraction of the cost. The primary
considerations…
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8.
IndyStar_DS
(PAGE 1 OF 2)
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…181.5 mm (7.15 in.)
125.5 mm (4.94 in.)
97.5 mm (3.84 in.)
890 mm (35 in.)
800 mm (31.5 in.)
58.5 mm
(2.3 in.)
IndyStar
High Repetition Rate Excimer Laser
Features
· Available for repetition rates of
1kHz and 2kHz
· Modified platform for updated…
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9.
IndyStar_MaskInspection.pdf
(PAGE 3 OF 4)
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based on electron beam
methods. The latter technique
makes use of various gas reactions in order to add or subtract material from the mask.
One system, developed by Carl
Zeiss and named >MeRiT<, is
the only technology available
on the market actually capable
of…
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10.
IndyStar_DS
(PAGE 1 OF 1)
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Ytterbium-Doped Double-Clad Fiber
YDC-1100-20/400 for Fiber Lasers
Features
· High slope efficiency
· Humidity resistant low index
polymer coating
Applications
· High power CW fiber lasers from
1060 nm to 1110 nm (>700W)
Specifications Product Code…
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