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1. Coherent Inc. Semiconductor Manufacturing with Excimer Lasers
…volume manufacturing. * Resolution enhancement factor (k) resolution ? k ( l / NA) Immersion lithography results at 193nm using Smith-Talbot interferometry* and the BraggStar Industrial-LN at the Rochester Institute of Technology (courtesy of Prof. B.W. Smith). Resist images are 45nm at a 1.05NA and… Related Searches: krf

2. Coherent Inc. Lasers enable Laser Inspection
…other segment in laser inspection is the determination of the quality of the macroscopic shape and its deviation to a reference. For this purpose interferometry, shearography and holography using visible and deep UV wavelengths are widely used methods that achieve accuracy on the order of the wavelength… Related Searches: compass 315 \| compass 415m \| 315m controller

3. Coherent Inc. Scientific
…, Multiphoton microscopy and other laser-based imaging techniques, material and environmental sciences, pulse-laser deposition and holography/interferometry. As the world’s largest supplier of lasers, Coherent offer state-of-the-art laser systems in CW, Q-Switched and mode-locked operations ranging… Related Searches: raman

4. Coherent Inc. Sapphire OPSLs Enable Life Sciences Applications
…them the right choice for applications that need narrow and ultra-narrow linewidth laser light such as Raman spectroscopy, Brillouin scattering, interferometry, holography, metrology, inspection. Sapphire LP/HP/SF Driver Unit Controller and power supply in a wall plug-ready box, featuring a standby/laser… Related Searches: 488 sapphire \| sapphire \| 561 nm laser \| sapphire 561

5. ImmersionLithography163 2	Best match in this PDF \| All matches in this PDF
…Immersion Lithography Research Interferometric imaging for resist treating 1.5mm 6mm Immersion lithography results at 193nm using Smith-Talbot interferometry and a TuiLaser BraggStar Industrial LN at the Rochester Institute of Technology (courtesy of Prof. B.W. Smith). SEM photo of 34nm lines with high… Related Searches: coherence length \| corona

6. Coherent Inc. Genesis CX high power continuous wave (CW) lasers
…such as holography and interferometry from 355 nm to 577 nm. CX STM CX SLM Beam Quality Single Transverse Mode (TEM 00) • • Single Longitudinal Mode • Wavelength Range UV • • Visible • • Applications Life Sciences • Research • • Holography/Interferometry • Atom Cooling and Trapping… Related Searches: genesis 355 \| holography \| genesis cx \| genesis

SemiManufMagRev2

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…lasers operating at either 1064 nm or 355 nm. These lasers are proven to deliver the required combination of power, beam quality and reliability. interferometry is the highest precision tool we have for measuring these parameters. For metrology of 193 nm stepper lenses, the ideal interferometer source would…
Related Searches: wafer inspection | indigo | sapphire scribing | 257 nm laser

8. Coherent Inc. Genesis CX SLM Single Frequency laser
…(End User/OEM) With wavelengths from 355 nm to 577 nm, Genesix CX SLM lasers are ideal for single frequency applications such as holography and interferometry. Superior Reliability & Performance * Lasers and Laser-based Systems * Laser Measurement and Control * Precision Optics * Related Accessories The… Related Searches: genesis cx slm \| holography \| genesis slm

9. 03 T Coherent.42-46 (PAGE 5 OF 5)
interferometry is the highest precision tool we have for measuring these parameters. For metrology of 193 nm stepper lenses, the ideal interferometer source would have a short wavelength,ideally at or close to 193 nm itself. There are two reasons for this. First, interferometer sensitivity… Related Searches: titanium sapphire \| indigo duv \| sapphire scribing

10. IndyStar MaskInspection	Best match in this PDF \| All matches in this PDF
…limited. A more direct approach is to use an interferometer to measure the actual optical performance of the PSM. Unfortunately, the conventional interferometry tools currently in use can only measure features of a certain size and shape, and these features must typically be at least an order of magnitude… Related Searches: photolithography

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