1 - 10 of 28 Search Results for interferometry
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1.
Laser Inspection
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... other segment in laser inspection is the determination of the quality of the macroscopic shape and its deviation to a reference. For this purpose interferometry, shearography and holography using visible and deep UV wavelengths are widely used methods that achieve accuracy on the order of the wavelength ...
Related Searches: 266nm cw laser | laser engraving | permalign
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2.
EOfeb06Semi
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... that the structure of the material does not contain any defects. Taylor Hobson uses a method of non-contact metrology called coherence correlation interferometry (CCI) to examine semiconductor wafers. The TalySurf CCI 3000 measures the phase relationships of light reflected from the surface being measured ...
Related Searches: paladin | soft wafer mark | ldi
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4.
SemiManufMagRev2
(PAGE 5 OF 5)
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interferometry is the highest precision tool we have for measuring these parameters. For metrology of 193 nm stepper lenses, the ideal interferometer source would have a short wavelength, ideally at or close to 193 nm itself. There are two reasons for this. First, interferometer sensitivity increases ...
Related Searches: wafer cutting | indigo duv | 193 nm laser
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5.
Indigo_DUV
(PAGE 1 OF 2)
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... control · TEM00 beam profile · Stable (<3% RMS) at deep UV wavelengths KEY APPLICATIONS · 193 nm metrology · Spectrometer calibration · Interferometry IndigoTM-DUV is the first all solid-state, single-frequency, 193 nm laser designed for optical metrology and calibration of 193 nm lithography stepper ...
Related Searches: indigo laser | coherence length | indigo | deep uv
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7.
EOfeb06Semi
(PAGE 2 OF 2)
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... that the structure of the material does not contain any defects. Taylor Hobson uses a method of non-contact metrology called coherence correlation interferometry (CCI) to examine semiconductor wafers. The TalySurf CCI 3000 measures the phase relationships of light reflected from the surface being measured ...
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8.
Dr. David Reitze
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... and construction of the Input Optics for the Advanced LIGO detectors as well as research on advanced interferometer configurations, high precision interferometry, cryogenics, high power laser radiation effects in optical components, and LIGO data analysis. Bio-imaging Associations: Experimental ...
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9.
Semiconductor Manufacturing with Eximer Lasers
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... high volume manufacturing. Resolution enhancement factor (k) resolution » k *( l / NA) Immersion lithography results at 193nm using Smith-Talbot interferometry and the BraggStar Industrial-LN at the Rochester Institute of Technology (courtesy of Prof. B.W. Smith). Resist images are 45nm at a ...
Related Searches: semiconductor
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