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1.    HighRep-RateExcimerLasersforMicromachingRev2 Best match in this PDF  |  All matches in this PDF …device was a cost-effective, compact high repetition excimer laser which fully meets the industrial requirements. This laser delivers 16 mJ at 248 nm (KrF) and 6 mJ at 193 nm (ArF), both at 1000 Hz with high energy stability and burst performance. 2. PERFORMANCE CHARACTERISTICS OF COMPACT HIGH REPETITION… Related Searches: krf laser | arf laser | p4

2.  ExcimerProductGuide2008.qxd  (PAGE 18 OF 54) … Compact Design, Single · Quick and easy integration Phase, Advanced Service Concept 3. Specifications Parameter ArF ArF KrF KrF Wavelength (nm) 193 193 248 248 Max. Repetition Rate (Hz) 1000 2000 1000 2000 Stabilized Pulse Energy (mJ) 8 4 12 6 Stabilized…

3.  Coherent Inc. Semiconductor Manufacturing with Excimer Lasers …has proven its potential by extending the capability of optical lithography as light source for illumination and inspection. Summary From wavelengths KrF 248 nm, ArF 193 nm down to the fluorine version F2 at 157nm, for each generation of lithography systems the excimer laser is the tool for extension.…

4.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 2 OF 9) …stability at 16 mJ in KrF operation is specified with < 2% Sigma. Figure 1 shows a run over 50 million pulses without a total laser gas exchange. The energy stability is nearly constant at a typical achieved value of 0.5% Sigma. Figure 1: Typical energy stability KrF over 50 million pulses…

5.    LTJ Excimer 0607 Best match in this PDF  |  All matches in this PDF …electrodes that run the entire length of the plasmatube.Theresultantplasmacontainsa high concentration of excited dimers (hence the name "excimer"), such as krF, ArF, XeCl resulting in a laser with high gain and hence high energy per pulse. The typical pulse duration for an excimer laser is in the 10-70 nanoseconds… Related Searches: thyratron switch | futuretube | preionization | thyratron

6.  ExcimerProductGuide2008.qxd  (PAGE 23 OF 52) …(COMPexPro 200) 1149339 Beam aligner 1132990 Temperature stabilization module 3. Specifications COMPexPro 150T ArF COMPexPro 150T KrF Part No. (F-version) 1156774 1156774 · Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170

7.    pdf 126 Best match in this PDF  |  All matches in this PDF …-Universität Linz, Austria LAMBDA HIGHLIGHTSA PUBLICATION BY LAMBDA PHYSIK · JULY 2002 · No. 60 Fig. 4: AFM picture of holes produced by single-shot KrF-laser ablation of PI. The substrate was placed at a distance z = f + with 2.7µm. The arrangement of holes is equal to that of the interference maxima… Related Searches: coherence length | laser pdf | spatial filter | top hat profile

8.    OLEreprintCOHERENTJul07 Best match in this PDF  |  All matches in this PDF …of a KrF excimer laser. These 248nm pulses are then passed through a modified commercialexcimerlaser(CoherentLPX200), which is equipped with windows rather than cavity mirrors. Two aspects of this approach merit discussion. Firstly, the moderate saturation fluence of excimers (2 mJ/cm2 for KrF) sets…

9.    pdf 119 Best match in this PDF  |  All matches in this PDF …excited states. Under defined conditions the LIF emission intensity from these excited states is related to species concentration. Using a narrowband KrF excimer laser (248 nm), concentration distributions of combustion relevant species, such as O2, OH or NO, can be investigated by 2D-LIF. Concentrations… Related Searches: pulse duration extender | lpx 300 | dye laser | compex 150

10.    pdf 232 Best match in this PDF  |  All matches in this PDF …laser beam (Figure 1). Figure 2 shows side-view and top-view images of toluene ablation at the delay time between 100 ns and 100 µs after ns-pulsed KrF excimer laser irradiation ( = 248 nm) at fluence of 1.6 J cm-2 pulse-1 . [1] These images were taken by the use of a timedelayed flashlight at 560 nm… Related Searches: price list | sapphire laser price list | laser pdf | pulse laser

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