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krf excimer

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…interface of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…interface of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…interface of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light…

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