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krf laser

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

…Part Number USB 1191449 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm.These sensors feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that…

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

…Part Number USB 1191449 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm.These sensors feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that…

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

…Part Number USB 1191449 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm.These sensors feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…1146237 1110575 1110745 1110741 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm.These sensors feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…1146237 1110575 1110745 1110741 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm.These sensors feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light interferometry…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light interferometry…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…of at some 700 mJ/cm2 has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light interferometry…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

…of a sealing it may be favorable when the laser radiation penetrates into deeper layers and causes some depth effect, ablation of only a thin film requires deposition of the laser energy in the top layer of the surface. This is best realized with lasers operating in the UV, where paint and plastics…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

…of a sealing it may be favorable when the laser radiation penetrates into deeper layers and causes some depth effect, ablation of only a thin film requires deposition of the laser energy in the top layer of the surface. This is best realized with lasers operating in the UV, where paint and plastics…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

…of a sealing it may be favorable when the laser radiation penetrates into deeper layers and causes some depth effect, ablation of only a thin film requires deposition of the laser energy in the top layer of the surface. This is best realized with lasers operating in the UV, where paint and plastics…

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