1 - 10 of 16 Search Results for lambda physik lpx
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2.
Excimer lasers for thin films
(PAGE 5 OF 6)
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halogen injections have been introduced for excimer laser systems. Lambda Physik has optimized the halogen injections
in a way that only very small quantities of halogen are injected when a given high voltage level is reached. This keeps
the beam properties within the specified range during…
Related Searches: halogen
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4.
Excimer lasers for thin films
(PAGE 1 OF 6)
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Pulsed Excimer Lasers for Thin Film Applications
Ralph F. Delmdahl
Lambda Physik AG, Hans-Böckler-Straße 12, D-37079 Göttingen, Germany
E-mail: rdelmdahl@lambdaphysik.com
ABSTRACT
Ongoing progress in material research and processing industry is fueled to a large extent by…
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8.
Highlights No. 63 | 12.11.QXP
(PAGE 8 OF 16)
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…employed, and O(1D) reactants
were produced by photolysis of ozone at a
wavelength of 308 nm delivered by a XeCl
excimer laser (Lambda Physik LPX®
100).
Experiments were carried out in a reaction
chamber under flow conditions to prevent
accumulation of reaction products…
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9.
Highlights No. 63 | 12.11.QXP
(PAGE 14 OF 16)
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…has been
published before [1]. The experimental setup
is shown in Figure 1. LPP-radiation is
generated by an excimer laser (Lambda
Physik: LPX®
202, = 308 nm) that is
operated in a stable resonator mode, where
the divergence of the laser beam is of the
order…
Related Searches: compex 201 | tunable uv laser | scanmate
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10.
Highlights No. 56 nichtausg.QX3
(PAGE 4 OF 8)
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…characteristics or directional distribution of
the beam.
Measurements were performed in a
vacuum chamber for an LPX®
140i laser
(Lambda Physik) operated at 157 nm. Fig. 1
shows the spot distribution of the F2 laser
obtained with the Hartmann camera
described above, and, for…
Related Searches: he-ne laser
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