1 - 10 of 12 Search Results for lambda physik novaline
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6.
pdf_130.pdf
(PAGE 4 OF 8)
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…Roadmap 157nm Lasers
· First Lambda Physik 157nm
excimer laser in 1980
· Boost in gas lifetime and output
power by NovaTube in ´95
· Single line operation in ´98
· 1 kHz repetition rate in ´99
· Current Products:
NovaLine F500; 500 Hz 10 W
LPF 220; 200…
Related Searches: lpf
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7.
untitled
(PAGE 16 OF 136)
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We currently provide, through our 95.01% owned Lambda Physik subsidiary, NovaLine lasers with stable, linenarrowed, 2 kilohertz (kHz) operation at 248 nanometers (nm) (20 W); 4 kHz operation at 193nm (20 W); and we
developed the new dual-chamber 193nm LithoTex (50 W) at 4kHz with spectral purity…
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8.
Coherent, Inc. 10-K
(PAGE 6 OF 93)
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…of reducing semiconductor geometries
below 0.25 microns is with DUV lasers.
We currently provide, through our 60.4% owned Lambda Physik AG subsidiary, NovaLine lasers, which are
setting new standards of performance, with stable, line-narrowed, 2 kHz operation at 248 nm (30 W); 4 kHz
…
Related Searches: lambda chrome
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9.
Highlights No. 56 nichtausg.QX3
(PAGE 7 OF 8)
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…also offers
optical precision between features and welldefined edges between ablated and unexposed zones.
Our setup utilized a Lambda Physik
NovaLine F600 F2 laser, equipped with unstable resonator optics. In this configuration,
the laser delivered 157nm output capabilities
and…
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10.
Draft
(PAGE 1 OF 7)
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…Hans Stephan Albrecht, Peter Lokai, Wolfgang Zschocke,
Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte
Lambda Physik AG, Hans-Boeckler-Straße 12, D-37079 Goettingen, Germany
Tel: +49 551 69380 Fax: + 49 551 68691 e-mail: paetzel@lambdaphysik.com
ABSTRACT…
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