1 - 10 of 79 Search Results for lambda steel
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1.
300WXeClExcimerLaserAnnealingRev2
(PAGE 6 OF 8)
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The set-up of the laser device LAMBDA STEEL follows a strict modular concept. This is important in regards to serviceability and to increase uptime in demanding production lines. The laser tube can be adjusted after exchange inside the laser easily without touching the resonator nor the external beam ...
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2.
300WXeClExcimerLaserAnnealingRev2
(PAGE 2 OF 8)
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... the demanding TFT display manufacturer has resulted in a new generation of annealing laser. The findings of last developments are implemented in the LAMBDA STEEL (STEEL = Stable Energy Excimer Laser) high power excimer laser series. This series consists of a 180 W KrF, a 200 W XeCl, and the 300 W XeCl ...
Related Searches: excimer laser annealing
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5.
IMID_Korea_2004_17-4_SLS1Rev2
(PAGE 1 OF 3)
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... 17- 4: New Technology for Creation of LTPS with Excimer Laser Annealing Ludolf Herbst, Frank Simon*, Ulrich Rebhan, Rustem Osmanow, Burkhard Fechner Lambda Physik AG, Hans-Boeckler-Strasse 12, D-37079 Goettingen / Germany *MicroLas GmbH, Hans-Boeckler-Strasse 27, D-37079 Goettingen / Germany e-mail ...
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8.
300WXeClExcimerLaserAnnealingRev2
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... in Low Temperature Poly Silicon Technology Ludolf Herbst*a , Hans-Jürgen Kahlertb , Burkhard Fechnerc , Ulrich Rebhana , Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem GmbH, Robert-Bosch-Breite 10, D-37079 Göttingen, Germany; c Lambda ...
Related Searches: excimer laser annealing | laser annealing | homogenizer | microlas
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10.
IMID_Korea_2004_17-4_SLS1Rev2
(PAGE 3 OF 3)
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... Asia Display/IMID 04 Proceedings 2nd shot. Beam edge of 2nd shot should overlap with 1st shot [1]. Figure 6: The JSW FLXTM system incorporating the LAMBDA STEEL 2000 and the CrystaLas optics (source: The Japan Steel Works). Recent progress of SLS system development made it possible to use 30 mm FOV ...
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