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1 - 10 of 213 Search Results for laser annealing

1Coherent Inc. LineBeam for crystallization annealing applications.
laser crystallization annealing applications. Superior Reliability & Performance * Lasers and Laser-based Systems * Laser Measurement and Control * Precision Optics * Related Accessories Related Applications . -- Select a Related Application -- Annealing of Silicon Backplanes with 540W Excimer Lasers
Related Searches: ela | annealing

2pdf document  pdf 119 Best match in this PDF  |  All matches in this PDF
…processes. In addition, the throughput is high enough to be practical. Excimer laser annealing (ELA) systems (Japan Steel Works; Yokohama, Japan) based on MicroLas exposure technology with Lambda Physik (Ft. Lauderdale, FL) lasers are applied in production by scanning the line beam over a silicon-coated glass…
Related Searches: laser induced fluorescence | compex 110 | spectrum analyzer | dye laser

3pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
…excimer lasers allows to produce films with electron mobility of 100-150 cm²/Vsec with the Line beam technique. The new SLS-method, which is currently under industrial investigation, even allows to obtain electron mobility between 200-400 cm²/Vsec. Keywords: High power excimer laser, TFT annealing, UV…
Related Searches: silicon annealing | annealing | excimer laser annealing | ludolf herbst

4Coherent Inc. Excimer Lasers Drive Laser Crystallization for LTPS
…excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the manufacturing of LTPS based LCD and OLED displays. LAMBDA SX-Series The LAMBDA SX lasers are perfectly…
Related Searches: excimer laser annealing | vyper | ltps | crystals

5pdf document  NaturePhotonics201050thLaserAnn Annealing Best match in this PDF  |  All matches in this PDF
…excimer laser models with 10 mJ per pulse, pulse frequencies of up to 6 kHz and narrowed bandwidths of 0.35 pm are used in advanced photolithography to produce computer chips with feature sizes of 45 nm. Another major industrial growth market for excimer lasers is low-temperature polysilicon annealing. Here…
Related Searches: polysilicon annealing | silicon annealing | annealing | thyratron

6untitled  (PAGE 6 OF 136)
…eyestrain.
Laser technology continues to play an important role in satisfying the demands of
consumers. Manufacturers of flat panel displays depend upon lasers as an
indispensable production tool required in applications such as glass panel cutting,
serialization, and annealing of silicon…

7Microsoft Word - LTPS white paper final_Oct26.doc  (PAGE 7 OF 12)
lasers, such as the LSX 315C from Coherent, have a tube lifetime of 6 billion
pulses, whereas a MOPA laser has an estimated lifetime of 20 billion pulses. But due to the
higher repetition rates, MOPA lasers accumulate up to 20 times more pulses per hour than high
pulse energy lasers
Related Searches: ltps

8Coherent Inc., Download:50th Laser Anniversary – Annealing
Click here if you are not re-directed.

9pdf document  ExcimerProductGuide2011 Best match in this PDF  |  All matches in this PDF
…LAMBDA SX 540C HPS are specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimer lasers. 3. Specifications1 LAMBDA SX 315C LAMBDA SX 540C HPS…
Related Searches: 450 laser | braggstar s 200 | microlas attenuator | premix gas

10pdf document  LTJ Excimer0109 Best match in this PDF  |  All matches in this PDF
lasers are narrowband, ultraviolet light sources providing the shortest laser wavelengths or, which is equivalent, the highest laser photon energies for commercial laser based manufacturing [1]. since the optical resolution which is achievable in laser material processing is related to the laser's
Related Searches: fiber coupler | uv beam splitter | rainer paetzel | 213 nm


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