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1.  pdf document  pdf 148 Best match in this PDF  |  All matches in this PDF
…packaging, using SMIF box microenvironments. Metallization is done using a special ion beam sputter deposition tool optimized for low defect deposition (LDD-IBS). This tool possesses high flexibility for various layer systems and is capable of meeting the requirements for low defect EUV mask blanks in the…
Related Searches: spectral correction | spectrograph | photo detector | spectral

2.  Highlights No. 61 | 24.10.QXP  (PAGE 11 OF 12)
…microenvironments. Metallization is done
using a special ion beam
sputter deposition tool
optimized for low defect
deposition (LDD-IBS). This
tool possesses high flexibility
for various layer systems and
is capable of meeting the
requirements for low defect
…



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