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1 - 10 of 10 Search Results for ldu

1ExcimerProductGuide2008.qxd  (PAGE 18 OF 52)
…ExciStar
S-Industrial.With the integrated new tube technology
"Almeta" the IndyStar provides multiple lifetimes for
consumables like LDU (laser discharge unit) and optics about
several billion pulses compared to the ExciStar S-Industrial.
IndyStar excimer lasers are highly effective…

2pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF
…stability, bandwidth and energy stability. The mechanical stability determines the reproducibility of the laser after certain maintenance, such as LDU (Laser Discharge Unit) exchange. Mechanical stability is also required to isolate mechanical vibrations from the optical resonator in order to achieve…
Related Searches: novaline | 193 nm laser | sergei

3Draft  (PAGE 2 OF 7)
…stability, bandwidth and energy stability. The mechanical stability
determines the reproducibility of the laser after certain maintenance, such as LDU (Laser Discharge Unit) exchange.
Mechanical stability is also required to isolate mechanical vibrations from the optical resonator in order to achieve…

4pdf document  Q3-11-prepared remarks Best match in this PDF  |  All matches in this PDF
…lifetime of the laser discharge unit or LDU. The use pattern determines how many replacement LDUs are needed for each laser per year. Based on current estimates, the installed base plus the backlog will require hundreds of replacement LDUs per year. Our current LDU capacity is inadequate to support this…
Related Searches: singapore

5FCO Decision  (PAGE 12 OF 14)
…the laser discharge unit or LDU. The use pattern determines how many
replacement LDUs are needed for each laser per year. Based on current
estimates, the installed base plus the backlog will require hundreds of
replacement LDUs per year. Our current LDU capacity is inadequate to support…

6Coherent Inc. ExciStar XS Excimer laser up to 10mJ/pulse.
…preionization and a solid state switch. New tube design “Almeta XS”/ Corona preionization and Solid state switching The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the AlmetaXS tube with corona pre-ionization and a solid-state-switch. This results in extended lifetimes for…
Related Searches: excistar | 193nm | excistar 200

7Coherent Inc. Xantos XS laser at 157, 193, 248 and 351 nm.
…solid-state switching The Xantos XS is a modern, compact excimer laser, equipped with the ExciStar XS laser unit. The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the Almeta XS tube with corona pre-ionization and a solid-state-switch. This set-up results in extended lifetimes…
Related Searches: 248

8Coherent Inc. IndyStar Series supports 2000Hz repetition rate.
…overall lifetime of these components. Lower costs of operation are the result of these special features. In order to achieve the highest uptime the LDU (Laser Discharge Unit = laser tube + solid state switch + halogen filter) is placed on a chamber slide, which can be easily removed out of the housing…
Related Searches: indystar | 1khz

9Draft  (PAGE 3 OF 7)
…chassis and laser
optics is avoided. Figure 1 and Figure 2 compare results on wavelength stability achieved with the old and with the
improved LDU suspension without active stabilization. The graphs show at same scale the single pulse wavelength
stability (blue) and the moving average of 46…

10ExcimerProductGuide2008.qxd  (PAGE 18 OF 52)
…ExciStar
S-Industrial.With the integrated new tube technology
"Almeta" the IndyStar provides multiple lifetimes for
consumables like LDU (laser discharge unit) and optics about
several billion pulses compared to the ExciStar S-Industrial.
IndyStar excimer lasers are highly effective…




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