1 - 10 of 11 Search Results for ldu
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2.
ExcimerLasersforSuper-HighNA193nmLithographyRev2
(PAGE 2 OF 7)
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... stability, bandwidth and energy stability. The mechanical stability determines the reproducibility of the laser after certain maintenance, such as LDU (Laser Discharge Unit) exchange. Mechanical stability is also required to isolate mechanical vibrations from the optical resonator in order to achieve ...
Related Searches: novaline
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3.
ExcimerLasersforSuper-HighNA193nmLithographyRev2
(PAGE 3 OF 7)
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... the chassis and laser optics is avoided. Figure 1 and Figure 2 compare results on wavelength stability achieved with the old and with the improved LDU suspension without active stabilization. The graphs show at same scale the single pulse wavelength stability (blue) and the moving average of 46 pulses ...
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5.
Xantos XS
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... -state switching The Xantos XS is a modern, compact excimer laser, equipped with the ExciStar XS laser unit. The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the Almeta XS tube with corona pre-ionization and a solid-state-switch. This set-up results in extended lifetimes ...
Related Searches: 157 | xantos xs | xantos
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6.
BraggStar S-Industrial (BSI) Series
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... floors the BraggStar S-Industrial is also fulfilling the requirements of a Semi-S2-Standard. In order to achieve the highest uptime the LDU (Laser Discharge Unit = Laser tube + solid state switch + halogen filter) is placed on a chamber slide, which can be easily removed in case of a consumable exchange ...
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8.
ExciStar™ XS Series
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... and a solid state switch. New tube design “Almeta XS”/ Corona preionization and Solid state switching The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the AlmetaXS tube with corona pre-ionization and a solid-state-switch. This results in extended lifetimes for these ...
Related Searches: excistar
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9.
ExcimerProductGuide2008
(PAGE 18 OF 48)
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... the ExciStar S-Industrial.With the integrated new tube technology "Almeta" the IndyStar provides multiple lifetimes for consumables like LDU (laser discharge unit) and optics about several billion pulses compared to the ExciStar S-Industrial. IndyStar excimer lasers are highly effective light ...
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10.
IndyStar Series
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... overall lifetime of these components. Lower costs of operation are the result of these special features. In order to achieve the highest uptime the LDU (Laser Discharge Unit = laser tube + solid state switch + halogen filter) is placed on a chamber slide, which can be easily removed out of the housing ...
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