LineBeam System for Crystallization Annealing Applications LineBeam for excimer laser annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates Superior Reliability & Performance Lasers and Laser-based Systems Laser Measurement and ...
UV Beam Homogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ... Related Searches:beam homogenizer | microlas | lpx pro | beam profiler
0506lf06f1.eps BEAM-SHAPING OPTICS Reprinted with revisions to format, from the June 2005 edition of LASER FOCUS WORLD Copyright 2005 by Pennwell Corporation Beam-shaping optics expand excimer-laser applications ANDREW MASTERS AND THORSTEN GEUKING xcimer lasers are used in an increasingly diverse range ... Related Searches:homogenizer | beam shaper | beam delivery | beam profiler
... window has to be removed or replaced by fused silica. For 193nm, the indirect method with fluorescence plate is being used. Clearly, direct UV beam micropattern monitoring requires an effort much higher than the methods using fluorescent plates described above (a, b). Whether (d) is necessary or can ... Related Searches:ccd camera
0506lf06f2.eps BEAM-SHAPING OPTICS thus consists of the average of the profile of the individual slices. Separate lenslet arrays are used for the x and y axes because the axes have different intensity distributions and dimensions. This simple approach provides flexibility in system size, performance ... Related Searches:beam homogenizer
... industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and shaping procedure before applying it to material processing is necessary. Even more important, the optimization of beam homogenizing ... Related Searches:beam shaper | beam homogenizer
Summary Beam profile monitoring is of great advantage in high precision excimer laser-based processing. For example, the homogenous illumination of a hole array mask provides highaccuracy hole size control of the ink jet nozzles to be drilled with excimer laser radiation. The crystallization process ...
Page 3 The LineBeam ELA Process The first LTPS process to go into mass production became known as Excimer Laser Annealing or ELA and was introduced in 1997. Here the rectangular beam from a 308 nm excimer laser is optically homogenized and re-shaped to produce a beam with a line-shaped cross-section ...
... high pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for linebeam excimer laser annealing. 1. Introduction Middle and small size flat panel displays (FPD) are under a constant challenge to provide higher resolution ... Related Searches:beam homogenizer | excimer laser annealing | microlas | camera