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1.    300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF ... due to the low temperature of the annealing process. The Lambda Physik high power excimer laser series are operated with the MicroLas 370 mm line beam optics, integrated by Japan Steel Works into industrial systems. The MicroLas line beam optics for conventional excimer laser annealing (ELA) process ... Related Searches: xecl | microlas | laser annealing | ltps

2.    UVBEAM Best match in this PDF  |  All matches in this PDF UV Beam Homogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ... Related Searches: beam homogenizer | microlas | homogenizer | lpx pro

3.    UVBEAM  (PAGE 2 OF 6) ... industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and shaping procedure before applying it to material processing is necessary. Even more important, the optimization of beam homogenizing ... Related Searches: beam shaper | beam homogenizer

4.    UVBEAM  (PAGE 4 OF 6) ... window has to be removed or replaced by fused silica. For 193nm, the indirect method with fluorescence plate is being used. Clearly, direct UV beam micropattern monitoring requires an effort much higher than the methods using fluorescent plates described above (a, b). Whether (d) is necessary or can ...

5.    IMID_Korea_2004_17-4_SLS1Rev2 Best match in this PDF  |  All matches in this PDF ... @lambdaphysik.com Phone: +49 551 69380 Fax: +49 551 68691 Abstract We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates ... Related Searches: excimer laser annealing | beam homogenizer | microlas | camera

6.    UVBEAM  (PAGE 5 OF 6) Summary Beam profile monitoring is of great advantage in high precision excimer laser-based processing. For example, the homogenous illumination of a hole array mask provides highaccuracy hole size control of the ink jet nozzles to be drilled with excimer laser radiation. The crystallization process ...

7.    IMID_Korea_2004_17-4_SLS1Rev2  (PAGE 3 OF 3) Asia Display/IMID 04 Proceedings 2nd shot. Beam edge of 2nd shot should overlap with 1st shot [1]. Figure 6: The JSW FLXTM system incorporating the LAMBDA STEEL 2000 and the CrystaLas optics (source: The Japan Steel Works). Recent progress of SLS system development made it possible to use 30 mm FOV ...

8.  Silicon Annealing with Eximer Lasers ... laser light (308 nm) is very efficiently absorbed in an ultra thin amorphous silicon surface layer without heating the underlying substrate. A line-shaped and homogenized excimer laser beam is scanned across the surface. See Figure 2. Within the laser pulse duration (approx. 25 ns) the amorphous-silicon ... Related Searches: excimer laser annealing | microlas | annealing | tv

9.  Line Beam Line Beam System for Crystallization Annealing Applications Line Beam for excimer laser annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates Superior Reliability & Performance Lasers and Laser-based Systems Laser Measurement and ... Related Searches: laser annealing | line

10.  Nozzle Drilling for Inkjet Printers ... lasers, we have developed an Industrial Applications finder’s tool. Coherent lasers & nozzle drilling for inkjet printers Sub-Micron Accuracy Line Beam Optics Nozzle Array High-Duty Cycle NEW! Quick Application Finder Search Applications Notes Search by material and/or process. -- SELECT MATERIAL ... Related Searches: beam shaper | soldering | welding

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