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1.    ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF ... spectrum of the laser to be less than 0.30 pm FWHM. In this paper we report on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design ... Related Searches: lambda physik | 193 nm laser | ldu | a4003

2.    Excimer_Product_Guide_2008  (PAGE 14 OF 48) ... profile Solid-State Pulser · "Soft" discharge for better pointing stability and energy stability · Especially suitable for FBG Writing Line-Narrowed · With line-narrowing module BraggStar Version for maximized temporal coherence Air-Cooled · Quick and easy integration (water-cooled optional ...

3.    ExcimerProductGuide2008  (PAGE 14 OF 48) ... profile Solid-State Pulser · "Soft" discharge for better pointing stability and energy stability · Especially suitable for FBG Writing Line-Narrowed · With line-narrowing module BraggStar Version for maximized temporal coherence Air-Cooled · Quick and easy integration (water-cooled optional ...

4.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 1 OF 7) ... spectrum of the laser to be less than 0.30 pm FWHM. In this paper we report on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL ) design ... Related Searches: 193 nm laser

5.  BraggStar Industrial (BSI) Series ... is essential. The BraggStar Industrial series is based on the platform of the IndyStar and is available at 193/248nm, optionally equipped with a LN (Line Narrowing) module. This type of excimer laser is a versatile UV light source delivering excellent performance for all types of Phase Mask Fiber Bragg ...

6.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 2 OF 7) ... rate and in our experimental lasers even up to 6 kHz. When combining this laser discharge unit with an optical resonator to achieve an ultra-narrow bandwidth of i.e. 0.30 pm, FWHM it becomes apparent that there is strong influence from the laser gain medium on the spectral performance. At low repetition ... Related Searches: a4003

7.    ExcimerProductGuide2008 Best match in this PDF  |  All matches in this PDF Excimer Lasers · UV Optical Systems Product Catalog 2008 Superior Reliability & Performance A Full Line of Excimer Lasers As the world's largest laser manufacturer and the leader in excimer technology, we manufacture and ship more excimer lasers than all other laser companies combined. We're also ... Related Searches: halogen filter | excimer laser annealing | lambda | catalog

8.    Excimer_Product_Guide_2008 Best match in this PDF  |  All matches in this PDF Excimer Lasers · UV Optical Systems Product Catalog 2008 Superior Reliability & Performance A Full Line of Excimer Lasers As the world's largest laser manufacturer and the leader in excimer technology, we manufacture and ship more excimer lasers than all other laser companies combined. We're also ... Related Searches: excimer lamp | variable laser attenuator | user manual | 193 nm laser

9.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 3 OF 7) ... within these elements lead to wave front distortions and give direct impact on the wavelength selection and stability. When looking at ultra-narrow bandwidth of less than 0.30 pm, FWHM combined with high power the purge gas condition in the vicinity of the critical optical elements in the line-narrowing ...

10.    OLEReprintCoherentSep06  (PAGE 2 OF 3) linewidth is relatively large and the coherence is low, unless additional line narrowing elements are placed in the resonator. Excimer laser advantages The unique output characteristics of an excimer laser offer distinct advantages in many applications. For example, UV wavelengths enable processing ...

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