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Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…pulses. Table 2 shows the LLO system parameters and the calculated throughput parameters for the two- and single-scan approaches using 380 and 750 nm line beam lengths, respectively. A huge advantage of starting from temporary glass substrates in combination with LLO processing lies in the fact…

COHR LPXproSeries DS 1016 1.pdf

COHR LPXproSeries DS 1016 1.pdf

…Options: · Unstable Resonator · Fluor and Chlorine Version LPXpro Applications: · PLD - Pulsed Laser Deposition · LDP - Laser Direct Patterning · LLO - Laser Lift-Off High Pulse Energy Excimer Lasers The High Pulse Energy Laser LPXpro is a family of industrial proven excimer lasers, offered at…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BeamScoutBeamProfilerPackage UVblade Systems for Laser Lift-Off Applications Key Features · Cost effective laser optical solutions for Laser Lift-Off (LLO) · Single shot processing · Highest beam utilization · Homogeneous energy distribution · Includes Coherent excimer laser Specifications1 1…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com6 Applications Matrix1 Marking Polymer,TeflonMarking · · · · VisibleandInvisibleMarking(EyeglassMarking,etc.) · · · · DiamondandJewelMarking · Material Processing PolymerDrilling(InkjetNozzle,Filter) · · · ·…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…pulses. Table 2 shows the LLO system parameters and the calculated throughput parameters for the two- and single-scan approaches using 380 and 750 nm line beam lengths, respectively. A huge advantage of starting from temporary glass substrates in combination with LLO processing lies in the fact…

COHR UVbladeSeries 1116 1.pdf

COHR UVbladeSeries 1116 1.pdf

Superior Reliability & Performance UVblade Series UVblade Features: · Cost effective solutions for Laser Lift-Off (LLO) separation · Single-shot processing · Unmatched beam utilization · Choice of line beam lengths UVblade Options: · BeamScout Beam Profiler UVblade Applications: · Laser Lift-Off…

VarioLas 1000 DS

VarioLas 1000 DS

…1556.5mm(61.3in.) 1832.5mm(72.1in.) 1034.5mm(40.7in.) 3004 mm (118.3 in.) VarioLas Family UV Material Processing Systems Applications · Laser Lift-Off (LLO) · Processing ceramics, metals and polymers · Making micro-reactors (lab-on-a-chip) · Process development · Flexible small volume production ·…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…pulses. Table 2 shows the LLO system parameters and the calculated throughput parameters for the two- and single-scan approaches using 380 and 750 nm line beam lengths, respectively. A huge advantage of starting from temporary glass substrates in combination with LLO processing lies in the fact…

UVblade

UVblade

…Depth of Focus (µm) ±200 ±200 ±150 ±100/±150 (high power model) UV blade Key Features Cost Effective Laser Optical Solutions for Laser Lift-Off (LLO) Pulse on Demand (POD) Highest Beam Utilization Homogeneous Energy Distribution Scalability in Line Lengths and Energy Density Systems for Laser…

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