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LAMBDA SX

LAMBDA SX

…microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). Contact Us About This Product Close PRICE HERE Model Name…

Microelectronics

Microelectronics

…to accelerate as manufacturing costs come down and device efficiency improves. Novel laser-based manufacturing concepts such as laser-lift-off (LLO) processing with 193 nm and 248 nm excimer lasers enable vertical LED structures with increased light extraction efficiency. Laser-based sapphire…

IndyStar DS

IndyStar DS

…base world wide · Standard technology for silicon annealing process (LTPS-LCD, OLED) · Flexible and adaptable for various applications (e.g. ELA, LLO, Activation) · Perfect match with LAMBDA SX and LEAP excimer lasers Options · Micro Smoothing Device · Beam Profiler · Pulse Duration Extender ·…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com20 LPXproisafamilyofRoHScompliantexcimerlasers, offeredatwavelengthsof193nm,248nm,308nm and351nm,withoutputpowersashighas80Wat 248nm.TheLPFprofamilyexpandswavelengthrange tovacuumUVwith157nm.Thebeamquality,high…

ILS Annealing.PDF

Temporary glass carrier Spin on polymer Silicon deposition - LTPS - TFT patterning OLED patterning Illumination with excimer beam for LLO Flexible display separated from glass carrier a p p l i c a t i o n r e p o r t Other high-power UV applications The unmatched ability of excimer lasers to…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…lift-off (LLO) delamination opens the path to polymer-based display backplanes for use in electrophoretic e-readers, AMOLED (Active-Matrix Organic Light Emitting Diode) smartphones, tablets, and OLED-TV. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…lift-off (LLO) delamination opens the path to polymer-based display backplanes for use in electrophoretic e-readers, AMOLED (Active-Matrix Organic Light Emitting Diode) smartphones, tablets, and OLED-TV. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…lift-off (LLO) delamination opens the path to polymer-based display backplanes for use in electrophoretic e-readers, AMOLED (Active-Matrix Organic Light Emitting Diode) smartphones, tablets, and OLED-TV. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO

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