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VarioLas 1000 DS

VarioLas 1000 DS

…1556.5mm(61.3in.) 1832.5mm(72.1in.) 1034.5mm(40.7in.) 3004 mm (118.3 in.) VarioLas Family UV Material Processing Systems Applications · Laser Lift-Off (LLO) · Processing ceramics, metals and polymers · Making micro-reactors (lab-on-a-chip) · Process development · Flexible small volume production ·…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…pulses. Table 2 shows the LLO system parameters and the calculated throughput parameters for the two- and single-scan approaches using 380 and 750 nm line beam lengths, respectively. A huge advantage of starting from temporary glass substrates in combination with LLO processing lies in the fact…

Microelectronics

Microelectronics

…to accelerate as manufacturing costs come down and device efficiency improves. Novel laser-based manufacturing concepts such as laser-lift-off (LLO) processing with 193 nm and 248 nm excimer lasers enable vertical LED structures with increased light extraction efficiency. Laser-based sapphire…

IndyStar DS

IndyStar DS

…base world wide · Standard technology for silicon annealing process (LTPS-LCD, OLED) · Flexible and adaptable for various applications (e.g. ELA, LLO, Activation) · Perfect match with LAMBDA SX and LEAP excimer lasers Options · Micro Smoothing Device · Beam Profiler · Pulse Duration Extender ·…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com20 LPXproisafamilyofRoHScompliantexcimerlasers, offeredatwavelengthsof193nm,248nm,308nm and351nm,withoutputpowersashighas80Wat 248nm.TheLPFprofamilyexpandswavelengthrange tovacuumUVwith157nm.Thebeamquality,high…

ILS Annealing.PDF

Temporary glass carrier Spin on polymer Silicon deposition - LTPS - TFT patterning OLED patterning Illumination with excimer beam for LLO Flexible display separated from glass carrier a p p l i c a t i o n r e p o r t Other high-power UV applications The unmatched ability of excimer lasers to…

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…production floor. It is used for applications ranging from microstructuring, advanced semiconductor packaging, Pulsed Laser Deposition Laser Lift-Off (LLO) to high power UV LIDAR. LEAP LEAP LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low…

250 kHz Ultrafast Amplifiers

250 kHz Ultrafast Amplifiers

…production floor. It is used for applications ranging from microstructuring, advanced semiconductor packaging, Pulsed Laser Deposition Laser Lift-Off (LLO) to high power UV LIDAR. Laser Marking Workstations Laser Marking Workstations The LME-RM Class 1 laser marker workstation platform for both…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

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