Spin on polymer
Silicon deposition - LTPS -
excimer beam for LLO
separated from glass carrier
a p p l i c a t i o n r e p o r t
Other high-power UV applications
and fast data acquisition
· 248 nm and 308 nm wavelengths
for optimized processing of a large
variety of materials
· LLO - Laser Lift-Off
· PLD - Pulsed Laser Deposition
· LDP - Laser Direct Patterning
…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…
…displays by means of excimer LLO.
Figure 2. Schematics of the LLO characteristics using short and
about 100 nm, with the typical polymer layer thicknesses
extending from some ten to some hundred micrometers .
As a consequence, LLO separation with short…
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16 Mar/ Apr 2018
A Coherent Whitepaper January 23, 2018
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applications, LLO also uses a stationary beam in combination with a moving substrate that is
precisely positioned by an x,y,z stage. For the best trade-off between…
…weitere Anwendungen der Excimerlaser...
Waldermann: Als weitere Anwendung
im Bereich modernster Bildschirmtechnik ist das Laser Lift-Off (LLO) zu
nennen, das bei der Herstellung flexibler Displays Anwendung findet, wie sie
zunehmend in Smartphones eingesetzt werden. Hier wird der…
…fast and large area processing · Ethernet interface for control and fast data acquisition · 248 nm and 308 nm wavelengths for optimized processing of a large variety of materials APPLICATIONS · LLO - Laser Lift-Off · PLD - Pulsed Laser Deposition · LDP - Laser Direct Patterning · Micro-Structuring
…Richard Waldermann on the current state of excimer lasers and their future prospects.
Keywords: Excimer Laser, ELA - Excimer Laser Annealing, LLO - Laser Lift-Off, LASIK
are now for complete laser systems
which include sophisticated beam delivery optics.
The Excimer Business Unit…
…lengths supporting fast and effective separation of substrates and wafers. FEATURES & BENEFITS · Cost effective solutions for Laser Lift-Off (LLO) separation · Pulse on Demand (POD) · Unmatched beam utilization · Scalability in line lengths and energy density OPTIONS · BeamScout Beam Profiler…
…structuring, advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS · Perfect energy stability to ensure…
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