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Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…pulses. Table 2 shows the LLO system parameters and the calculated throughput parameters for the two- and single-scan approaches using 380 and 750 nm line beam lengths, respectively. A huge advantage of starting from temporary glass substrates in combination with LLO processing lies in the fact…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BeamScoutBeamProfilerPackage UVblade Systems for Laser Lift-Off Applications Key Features · Cost effective laser optical solutions for Laser Lift-Off (LLO) · Single shot processing · Highest beam utilization · Homogeneous energy distribution · Includes Coherent excimer laser Specifications1 1…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com6 Applications Matrix1 Marking Polymer,TeflonMarking · · · · VisibleandInvisibleMarking(EyeglassMarking,etc.) · · · · DiamondandJewelMarking · Material Processing PolymerDrilling(InkjetNozzle,Filter) · · · ·…

IndyStar DS

IndyStar DS

…base world wide · Standard technology for silicon annealing process (LTPS-LCD, OLED) · Flexible and adaptable for various applications (e.g. ELA, LLO, Activation) · Perfect match with LAMBDA SX and LEAP excimer lasers Options · Micro Smoothing Device · Beam Profiler · Pulse Duration Extender ·…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…lift-off (LLO) delamination opens the path to polymer-based display backplanes for use in electrophoretic e-readers, AMOLED (Active-Matrix Organic Light Emitting Diode) smartphones, tablets, and OLED-TV. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…glass panel. 4. Conclusion UV LLO delamination opens the path to polymerbased active-matrix display panels such as smartphones, e-readers, tablets, and potentially large OLED-TVs. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO processing of functional…

STT Conf. 3-98 paper c1.doc

STT Conf. 3-98 paper c1.doc

…section. The temperature range specification for the LLO is non-trivial as well. The system will be tested from -10 to 50 C (operational), and from -35 to 60 C (non-op survival). LLO Configuration The LLO block diagram is shown in Figure 1. The LLO electronically interfaces with the MLS via three…

STT Conf. 3-98 paper c1.doc

STT Conf. 3-98 paper c1.doc

…section. The temperature range specification for the LLO is non-trivial as well. The system will be tested from -10 to 50 C (operational), and from -35 to 60 C (non-op survival). LLO Configuration The LLO block diagram is shown in Figure 1. The LLO electronically interfaces with the MLS via three…

STT Conf. 3-98 paper c1.doc

STT Conf. 3-98 paper c1.doc

…section. The temperature range specification for the LLO is non-trivial as well. The system will be tested from -10 to 50 C (operational), and from -35 to 60 C (non-op survival). LLO Configuration The LLO block diagram is shown in Figure 1. The LLO electronically interfaces with the MLS via three…

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