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llo

ILS Annealing.PDF

…carrier
Spin on polymer
Silicon deposition - LTPS -
TFT patterning
OLED patterning
Illumination with
excimer beam for LLO
Flexible display
separated from glass carrier
a p p l i c a t i o n r e p o r t
Other high-power UV applications
The…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


and fast data acquisition
· 248 nm and 308 nm wavelengths
for optimized processing of a large
variety of materials
APPLICATIONS
· LLO - Laser Lift-Off
· PLD - Pulsed Laser Deposition
· LDP - Laser Direct Patterning
· Micro-Structuring
LEAP

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…displays by means of excimer LLO.
Figure 2. Schematics of the LLO characteristics using short and
long wavelengths.
about 100 nm, with the typical polymer layer thicknesses
extending from some ten to some hundred micrometers [5].
As a consequence, LLO separation with short…

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

…Cover Story
www.laserfocusworld.com.cn Laser Focus World China
16 Mar/ Apr 2018
4PLD

SrTiO3
Lcn
PT

LLO
LLO

1

308nm LLO

""

10,000

YBCO""
77K

YBCO

PLD YBCO
PLD

PLD

YBCO
PLD 308nm

1~2µm
4~12mm…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

A Coherent Whitepaper January 23, 2018
www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983
applications, LLO also uses a stationary beam in combination with a moving substrate that is
precisely positioned by an x,y,z stage. For the best trade-off between…

EU LASER Interview R Waldermann Goettingen German.pdf

EU LASER Interview R Waldermann Goettingen German.pdf

…weitere Anwendungen der Excimerlaser...
Waldermann: Als weitere Anwendung
im Bereich modernster Bildschirmtechnik ist das Laser Lift-Off (LLO) zu
nennen, das bei der Herstellung flexibler Displays Anwendung findet, wie sie
zunehmend in Smartphones eingesetzt werden. Hier wird der…

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…fast and large area processing · Ethernet interface for control and fast data acquisition · 248 nm and 308 nm wavelengths for optimized processing of a large variety of materials APPLICATIONS · LLO - Laser Lift-Off · PLD - Pulsed Laser Deposition · LDP - Laser Direct Patterning · Micro-Structuring

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…Richard Waldermann on the current state of excimer lasers and their future prospects.
Keywords: Excimer Laser, ELA - Excimer Laser Annealing, LLO - Laser Lift-Off, LASIK
are now for complete laser systems
which include sophisticated beam delivery optics.
The Excimer Business Unit…

COHR UVblade DS 0818 7.pdf

COHR UVblade DS 0818 7.pdf

…lengths supporting fast and effective separation of substrates and wafers. FEATURES & BENEFITS · Cost effective solutions for Laser Lift-Off (LLO) separation · Pulse on Demand (POD) · Unmatched beam utilization · Scalability in line lengths and energy density OPTIONS · BeamScout Beam Profiler…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…structuring, advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS · Perfect energy stability to ensure…

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