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Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

UVblade

UVblade

UVblade UV System for Laser Lift-Off Applications. Laser lift-off (LLO) is the key technology in manufacturing flexible digital displays where thin-film transistor device structures are typically fabricated directly onto a polymer layer that has been spun on a glass substrate. Contact Us About This…

ILS Annealing.PDF

Temporary glass carrier Spin on polymer Silicon deposition - LTPS - TFT patterning OLED patterning Illumination with excimer beam for LLO Flexible display separated from glass carrier a p p l i c a t i o n r e p o r t Other high-power UV applications The unmatched ability of excimer lasers to…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com20 LPXproisafamilyofRoHScompliantexcimerlasers, offeredatwavelengthsof193nm,248nm,308nm and351nm,withoutputpowersashighas80Wat 248nm.TheLPFprofamilyexpandswavelengthrange tovacuumUVwith157nm.Thebeamquality,high…

VarioLas 1000 DS

VarioLas 1000 DS

…1556.5mm(61.3in.) 1832.5mm(72.1in.) 1034.5mm(40.7in.) 3004 mm (118.3 in.) VarioLas Family UV Material Processing Systems Applications · Laser Lift-Off (LLO) · Processing ceramics, metals and polymers · Making micro-reactors (lab-on-a-chip) · Process development · Flexible small volume production ·…

LPXpro

LPXpro

…demanding, high-precision processing tasks. These include drilling, pulsed laser deposition (PLD), laser direct patterning (LDP), laser lift off (LLO), and cleaning. Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) LPFpro 205 157 50 50 2.5 LPFpro 220 200 40…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…microelectronics Schematic layout of a line beam optical system for wafer LLO 308 nm LLO removal of 70 µm thin silicon wafer from glass carrier GaN surface after 248 nm LLO of sapphire Illustration of the UV wavelength advantage in LLO Microelectronics Application Substrate Size PRF Field size #…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…flexible displays by means of excimer LLO. Figure 2. Schematics of the LLO characteristics using short and long wavelengths. about 100 nm, with the typical polymer layer thicknesses extending from some ten to some hundred micrometers [5]. As a consequence, LLO separation with short wavelengths…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…advanced semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…BeamScoutBeamProfilerPackage UVblade Systems for Laser Lift-Off Applications Key Features · Cost effective laser optical solutions for Laser Lift-Off (LLO) · Single shot processing · Highest beam utilization · Homogeneous energy distribution · Includes Coherent excimer laser Specifications1 1…

LAMBDA SX

LAMBDA SX

…only). The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput. Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max.…

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