1 - 3 of 3 Search Results for lpf 220i
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pdf_130
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The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ...
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2.
702_TuiLaser_Reprint
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... and MicroLas Lasersystem GmbH, both in Göttingen. The researchers configured a cylindrical lens system to homogenize the beam from a Lambda Physik LPF 220i F2 laser and to focus it on a 6 6-mm aperture for uniform illumination at the mask plane. A 25 Schwarzschild lens delivered uniform ±5 percent on ...
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3.
702_TuiLaser_Reprint
(PAGE 4 OF 4)
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... and MicroLas Lasersystem GmbH, both in Göttingen. The researchers configured a cylindrical lens system to homogenize the beam from a Lambda Physik LPF 220i F2 laser and to focus it on a 6 6-mm aperture for uniform illumination at the mask plane. A 25 Schwarzschild lens delivered uniform ±5 percent on ...
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