1 - 10 of 29 Search Results for lpx
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1.
Coherent-11.25.09-FA
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…panel display industries: (a) Avia TM (266 and 355 nm, nanosecond), (b) Paladin TM (355 nm, quasi-CW), (c) Talisker TM (355 nm, picosecond), and (d) LPX excimer (157, 193, 248, 308, and 351 nm, nanosecond). Figure 6: The Coherent-Equinox-Fab-TT laser-based tool utilizes multiple laser sources integrated…
Related Searches: laser pattern | laser scribing of solar panels | edge isolation | picosecond laser
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2.
pdf_130.pdf
(PAGE 6 OF 8)
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…introduction of laser radiation for ionization of products, as an alternative to standard electron impact ionization. For example, a 157nm beam (from a LPX 220i laser) was directed into the system for single-step ionization. Many transition metal atoms and compounds have ionization potentials…
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3.
Excimer lasers for thin films
(PAGE 6 OF 6)
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…laser series LPX and COMPex have been described in this paper. Based on proven technologies applied for industrial and lithography excimer laser sources, stable and cost-efficient high-pulse energy lasers fitted to thin film production demands have been realized. The COMPex and LPX laser series…
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Excimer lasers for thin films
(PAGE 3 OF 6)
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…near-gaussian distribution, the long axis the flat-top distribution. Due to the efficient and smooth ceramic preionization scheme in COMPex and LPX lasers this high homogeneity is maintained at high pulse energy operation. Figure 4: Homogeneous beam profile of the COMPex excimer laser, with…
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8.
Excimer lasers for thin films
(PAGE 5 OF 6)
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…wavelength of 193 nm achieved with the advanced LPX laser design. 4. OVERVIEW OF LASER PARAMETERS Table 1 gives a concise overview of the main specifications of the COMPex and LPX excimer lasers for a wavelength of 193 nm. COMPex LPX Wavelength 193 nm 193 nm Max. pulse energy…
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10.
Excimer lasers for thin films
(PAGE 2 OF 6)
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…pulse energy excimer lasers. 2.2 Optimized Gas Flow and Gas Purification System In order to extend the hands-off operation time of both the LPX series and the COMPex series, the gas flow architecture and the internal electrostatic gas purification systems have been redesigned. Laser gas…
Related Searches: excimer gas
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