1 - 10 of 29 Search Results for lpx
|
|
1.
Coherent-11.25.09-FA
|
Best match in this PDF
|
All matches in this PDF
|
…panel display industries: (a) Avia TM (266 and 355 nm, nanosecond), (b) Paladin TM (355 nm, quasi-CW), (c) Talisker TM (355 nm, picosecond), and (d) LPX excimer (157, 193, 248, 308, and 351 nm, nanosecond). Figure 6: The Coherent-Equinox-Fab-TT laser-based tool utilizes multiple laser sources integrated…
Related Searches: laser pattern | laser scribing of solar panels | edge isolation | picosecond laser
|
|
|
|
|
2.
pdf_130.pdf
(PAGE 6 OF 8)
|
|
…introduction of laser radiation for ionization of products, as an alternative to standard electron impact ionization.
For example, a 157nm beam (from a LPX
220i laser) was directed into the system for
single-step ionization. Many transition metal
atoms and compounds have ionization potentials…
Related Searches: scanmate
|
|
|
|
|
3.
Excimer lasers for thin films
(PAGE 6 OF 6)
|
|
…laser series LPX and COMPex have been described in this paper. Based on
proven technologies applied for industrial and lithography excimer laser sources, stable and cost-efficient high-pulse
energy lasers fitted to thin film production demands have been realized. The COMPex and LPX laser series…
|
|
|
|
|
6.
Excimer lasers for thin films
(PAGE 3 OF 6)
|
|
…near-gaussian distribution, the long axis the flat-top distribution. Due to the efficient and smooth ceramic
preionization scheme in COMPex and LPX lasers this high homogeneity is maintained at high pulse energy operation.
Figure 4: Homogeneous beam profile of the COMPex excimer laser, with…
|
|
|
|
|
8.
Excimer lasers for thin films
(PAGE 5 OF 6)
|
|
…wavelength of 193 nm achieved
with the advanced LPX laser design.
4. OVERVIEW OF LASER PARAMETERS
Table 1 gives a concise overview of the main specifications of the COMPex and LPX excimer lasers for a wavelength
of 193 nm.
COMPex LPX
Wavelength 193 nm 193 nm
Max. pulse energy…
Related Searches: lambda physik lpx
|
|
|
|
|
10.
Excimer lasers for thin films
(PAGE 2 OF 6)
|
|
…pulse energy excimer lasers.
2.2 Optimized Gas Flow and Gas Purification System
In order to extend the hands-off operation time of both the LPX series and the COMPex series, the gas flow architecture
and the internal electrostatic gas purification systems have been redesigned. Laser gas…
Related Searches: excimer gas
|
|
