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1 - 2 of 2 Search Results for lpx 210i
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1.  pdf document  pdf_130  (PAGE 3 OF 8)
... Lens Purged Housing Computer Controlled Stages Purged Adapter for 157 nm Operation Polycarbonate Tube Output Coupler HR 157 nm (Dielectric) HE Purge LPX 210i Excimer Laser Fig. 1: Schematic view of the experimental setup.

2.  pdf document  pdf_130 Best match in this PDF  |  All matches in this PDF
The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ...
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