1 - 4 of 4 Search Results for lsx 200c
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3.
ExcimerProductGuide2008
(PAGE 35 OF 48)
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... Subsystem for Integration Operating Wavelength 248 nm or 308 nm Field Size (mm2) 15.2 x 1.1 (other sizes on request) Energy Density (mJ/cm2) with LSX 200K (248 nm) 1220 with LSX 200C (308 mm) 1400 Field Size at Mask (mm2) 75 x 6 mm2 Inhomogeneity <_ ±2.5% (2 sigma) Projection Lens 5x/18 NA = 0.13 ...
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4.
Excimer_Product_Guide_2008
(PAGE 35 OF 48)
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... Subsystem for Integration Operating Wavelength 248 nm or 308 nm Field Size (mm2) 15.2 x 1.1 (other sizes on request) Energy Density (mJ/cm2) with LSX 200K (248 nm) 1220 with LSX 200C (308 mm) 1400 Field Size at Mask (mm2) 75 x 6 mm2 Inhomogeneity <_ ±2.5% (2 sigma) Projection Lens 5x/18 NA = 0.13 ...
Related Searches: microlas | beam homogenizer
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