1 - 10 of 82 Search Results for ltps
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1.
Microsoft Word - LTPS white paper final_Oct26.doc
(PAGE 2 OF 12)
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Page 2
technology that deliver benefits for both methods. It also discusses how these ongoing advances
in laser technology and LTPS will enable the use of poly-silicon in an ever wider range of
devices.
Technical Overview
In active FPDs, silicon forms the basic conductive layer…
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2.
Microsoft Word - LTPS white paper final_Oct26.doc
(PAGE 1 OF 12)
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…Low
Temperature Poly-Silicon (LTPS) annealing is the proven, preferred approach for producing the
critical poly-silicon layer during FPD fabrication. This whitepaper reviews the two established
laser methods - ELA and SLS - currently used for LTPS, and examines recent advances in laser…
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5.
Microsoft Word - LTPS white paper final_Oct26.doc
(PAGE 7 OF 12)
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Page 7
The latest LTPS lasers, such as the LSX 315C from Coherent, have a tube lifetime of 6 billion
pulses, whereas a MOPA laser has an estimated lifetime of 20 billion pulses. But due to the
higher repetition rates, MOPA lasers accumulate up to 20 times more pulses per hour than high…
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6.
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…selling point for Coherent Inc., which manufactures lasers used in the low-temperaturepolysilicon (LTPS) annealing process for small active-matrix (AM) LCD panels like those found in the Apple iPhone. LTPS annealing enables the transformation of amorphous silicon film into crystallized silicon films, which…
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7.
Microsoft Word - LTPS white paper final_Oct26.doc
(PAGE 6 OF 12)
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…recently been some
debate in this area regarding possible use of high pulse rate lasers for LTPS. Namely, can a laser
optimized for a high pulse rate application such as microlithography be used for LTPS, an
entirely different application. These microlithography lasers deliver pulse rates as…
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8.
Microsoft Word - LTPS white paper final_Oct26.doc
(PAGE 5 OF 12)
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…The most important laser characteristics for LTPS are high pulse energy, pulse to pulse energy
stability and high reliability. Fortunately, laser manufacturers continue to make strong advances
in all these key areas, thereby improving the LTPS process in terms of throughput, yield, device…
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10.
Coherent Inc. LAMBDA SX-Series provides highly stabilized UV power
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…Sequential Lateral Solidification (SLS) Three-Dimensional Structuring with UV Excimer Lasers Advanced Packaging and Interconnects Laser Crystallization for LTPS Laser Direct Patterning Laser Lift Off of Flexible Displays Medical Device Manufacturing Microelectromechanical Systems (MEMS) Microholes Nozzle Drilling…
Related Searches: krf excimer | ltps
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