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1 - 10 of 42 Search Results for ltps
Search Suggestions: excimer laser annealing | beam homogenizer | application notes | laser annealing | herbst | tv | xecl | microlas | lsx | excimer

1pdf document  IMID_Korea_2004_17-4_SLS1Rev2  (PAGE 2 OF 3)
... (source: Lambda Physik). 3. SLS Sequential lateral solidification (SLS) enables generation of nearsingle-crystal silicon films for the fabrication of LTPS for FPD TFT, systems-on-a-substrate such as system-on-insulator or system-on-glass [5][6]. The key of this technology is to control the size of melted ...
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2pdf document  LTPSWhitePaperFinal_Oct28 Best match in this PDF  |  All matches in this PDF
... include the latest active matrix organic light emitting displays (AM OLED) and system on panel (SOP) devices [3]. Low Temperature Poly-Silicon (LTPS) annealing is the proven, preferred approach for producing the critical poly-silicon layer during FPD fabrication. This whitepaper reviews the two established ...
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3Silicon Annealing with Excimer Lasers
... panel displays utilize polycrystalline silicon (poly-silicon), instead of amorphous silicon, and excimer laser-based Low-Temperature-Poly-Silicon (LTPS) annealing has become the most popular method for producing this material. There are actually several different excimer laser-based LTPS annealing techniques ...
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4pdf document  Information_Displayarticle Best match in this PDF  |  All matches in this PDF
... such as laptops and mobile phones has been a big selling point for Coherent Inc., which manufactures lasers used in the low-temperaturepolysilicon (LTPS) annealing process for small active-matrix (AM) LCD panels like those found in the Apple iPhone. LTPS annealing enables the transformation of amorphous ...
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5pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
... at lower costs and increasing display size [2]. One of the major advantages of low-temperature polycrystalline silicon thin film transistor (LTPS-TFT) technology is the opportunity to make use of low cost glass substrates due to the low temperature of the excimer laser annealing (ELA) process. Additionally ...
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6Silicon Annealing with Eximer Lasers
... single pixel of the screen, as shown in Figure 1. Excimer laser induced crystallization of amorphous silicon (a-Si) to low temperature poly-silicon (LTPS) is a pivotal technology for high performance TFT devices, offering excellent resolution and brightness, large angle of view, high pixel refresh rates ...
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7pdf document  ExcimerLaserSolutions Best match in this PDF  |  All matches in this PDF
... year 30% Difference from previous year 23% inmillionEUR 93.4 FPD Silicon Annealing -- ELA and SLS Excimer-enabled low temperature polysilicon (LTPS) annealing is critical to the performance of several types of high-resolution, highbrightness flat panel displays (FPDs). For both excimer laser annealing ...
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8pdf document  LTJ_Excimer_0607 Best match in this PDF  |  All matches in this PDF
... Processes One of the most important commercial applications for excimer lasers to emerge over the past few years is low temperature polysilicon (LTPS) annealing for the flat panel display (FPD) industry. Here, the laser is used to transform a layer of chemical vapor deposited amorphous silicon into ...
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... panel displays utilize polycrystalline silicon (poly-silicon), instead of amorphous silicon, and excimer laser-based Low-Temperature-Poly-Silicon (LTPS) annealing has become the most popular method for producing this material. There are actually several different excimer laser-based ...  more Silicon ...
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10pdf document  IMID_Korea_2004_17-4_SLS1Rev2  (PAGE 1 OF 3)
Asia Display/IMID 04 Proceedings 17- 4: New Technology for Creation of LTPS with Excimer Laser Annealing Ludolf Herbst, Frank Simon*, Ulrich Rebhan, Rustem Osmanow, Burkhard Fechner Lambda Physik AG, Hans-Boeckler-Strasse 12, D-37079 Goettingen / Germany *MicroLas GmbH, Hans-Boeckler-Strasse 27, D ...


Search Suggestions: excimer laser annealing | beam homogenizer | application notes | laser annealing | herbst | tv | xecl | microlas | lsx | excimer
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