1 - 10 of 42 Search Results for ltps
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1.
IMID_Korea_2004_17-4_SLS1Rev2
(PAGE 2 OF 3)
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... (source: Lambda Physik). 3. SLS Sequential lateral solidification (SLS) enables generation of nearsingle-crystal silicon films for the fabrication of LTPS for FPD TFT, systems-on-a-substrate such as system-on-insulator or system-on-glass [5][6]. The key of this technology is to control the size of melted ...
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Silicon Annealing with Eximer Lasers
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... single pixel of the screen, as shown in Figure 1. Excimer laser induced crystallization of amorphous silicon (a-Si) to low temperature poly-silicon (LTPS) is a pivotal technology for high performance TFT devices, offering excellent resolution and brightness, large angle of view, high pixel refresh rates ...
Related Searches: excimer laser annealing | microlas | annealing | tv
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8.
LTJ_Excimer_0607
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... Processes One of the most important commercial applications for excimer lasers to emerge over the past few years is low temperature polysilicon (LTPS) annealing for the flat panel display (FPD) industry. Here, the laser is used to transform a layer of chemical vapor deposited amorphous silicon into ...
Related Searches: johannes junger
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[index.cfm?fuseaction=Forms.ShowApp1List.cfm&startrow=51]
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... panel displays utilize polycrystalline silicon (poly-silicon), instead of amorphous silicon, and excimer laser-based Low-Temperature-Poly-Silicon (LTPS) annealing has become the most popular method for producing this material. There are actually several different excimer laser-based ... more Silicon ...
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10.
IMID_Korea_2004_17-4_SLS1Rev2
(PAGE 1 OF 3)
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Asia Display/IMID 04 Proceedings 17- 4: New Technology for Creation of LTPS with Excimer Laser Annealing Ludolf Herbst, Frank Simon*, Ulrich Rebhan, Rustem Osmanow, Burkhard Fechner Lambda Physik AG, Hans-Boeckler-Strasse 12, D-37079 Goettingen / Germany *MicroLas GmbH, Hans-Boeckler-Strasse 27, D ...
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