1 - 10 of 65 Search Results for microlas
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5.
MicroLas_brochure_3.qxd
(PAGE 4 OF 6)
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…producing thinfilm transistors (TFT) and micromachining,
it is critical to deliver a beam with a highly
uniform intensity profile. The MicroLas line
of beam homogenizers includes patented
optical components that can be configured
to transform the output of any excimer laser…
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6.
MicroLas_brochure_3.qxd
(PAGE 5 OF 6)
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Other Systems & Accessories
VarioLasTM is the most flexible member of
the MicroLas product line. It is used in various
R&D applications, including glass marking,
materials research, and combustion studies,
as well as for micromachining metal, polyimide, Teflon, and quartz. VarioLas…
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7.
300WXeClExcimerLaserAnnealingRev2
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Best match in this PDF
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All matches in this PDF
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…-Jürgen Kahlertb , Burkhard Fechnerc , Ulrich Rebhana , Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem GmbH, Robert-Bosch-Breite 10, D-37079 Göttingen, Germany; c Lambda Physik Japan Co., Ltd., 1-18-2, Hakusan, Midori-ku, 226-006 Yokohama…
Related Searches: silicon annealing | annealing | excimer laser annealing | ludolf herbst
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9.
ExcimerProductGuide2008.qxd
(PAGE 39 OF 52)
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39
UVOpticalSystems
5X Optical Subsystems
UV Optical Systems
1. Description
MicroLas 5x optical subsystems are manufactured for
integration into workstations. Configurations consist of an
attenuator module, deflection mirrors, telescope lenses,
homogenizer optics…
Related Searches: beam homogenizer
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