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1 - 10 of 23 Search Results for novaline
Search Suggestions: 193 nm laser | etalon | lambda physics | scanmate | lpx 105 | 890 titanium sapphire laser | 205 | laser heating | f2 series | lpx 220
1.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF
... on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables ...
Related Searches: etalon | 193 nm laser

2.  DUV Microlithography
... optical aberrations will result. The most effective way to produce sufficient energy at the narrow spectral content is by using an excimer laser. NovaLine Lithography Series NovaLine® lasers are setting new standards of performance, with stable, line-narrowed, 2 kHz operation at 248 nm (30 W semi line ...

3.  pdf document  Coherent_Combo  (PAGE 16 OF 136)
We currently provide, through our 95.01% owned Lambda Physik subsidiary, NovaLine lasers with stable, linenarrowed, 2 kilohertz (kHz) operation at 248 nanometers (nm) (20 W); 4 kHz operation at 193nm (20 W); and we developed the new dual-chamber 193nm LithoTex (50 W) at 4kHz with spectral purity less ...

4.  pdf document  Coherent_Combo Best match in this PDF  |  All matches in this PDF
Annual Report, Proxy Statement & Notice of Annual Meeting 2004 In the highly sophisticated industry of photonics, Coherent, Inc. leads the way, offering reliability, cost and performance advantages for the widest range of commercial and scientific research applications. Founded in 1966, Coherent ...
Related Searches: lambda physics | 205 | lpx 220 | femtosecond laser system

5.  pdf document  pdf_130 Best match in this PDF  |  All matches in this PDF
The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ...
Related Searches: scanmate | lpx 105 | laser heating | dye laser

6.  pdf document  pdf_126  (PAGE 10 OF 12)
... in a fluence range from about 0.1 mJ/ cm2/pulse down to just a few J/cm2/pulse (Fig. 1). This system uses a 2 kHz broadband ArF laser (Lambda-Physik NovaLine A2030) to expose the samples. The exposure and measurement system handles up to 20 samples at a time, exposing them to different fluences and ...

7.  pdf document  2002%20AR Best match in this PDF  |  All matches in this PDF
UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark one) [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended September 28, 2002 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES ...
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8.  pdf document  Coherent_Combo  (PAGE 21 OF 136)
... markets they serve and the technologies upon which they are based. Market Segment Application Products Technology Microelectronics DUV lithography NovaLine LithoTex Excimer Excimer Photomask writing SabreFreD Innova NovaTex Frequency doubled ion Ion Excimer Semiconductor inspection and metrology Vitesse ...
Related Searches: optexpro | regenerative amplifier | lambda steel

9.  pdf document  pdf_129  (PAGE 7 OF 8)
... units (1 mJ, 200 Hz) to state-of-the-art industrial lasers (up to 20 mJ, at 1000 Hz). In the experiments we used an industrial Lambda Physik NovaLine F600. This highduty-cycle fluorine laser delivers 10 mJ stabilized pulse energy at pulse repetition rates of 600 Hz. At constant output power of 12 W ...

10.  pdf document  pdf_130  (PAGE 4 OF 8)
... laser in 1980 Boost in gas lifetime and output power by NovaTube in 95 Single line operation in 98 1 kHz repetition rate in 99 Current Products: NovaLine F500; 500 Hz 10 W LPF 220; 200 Hz, > 5 W OPTex; 50 mW Highlights N 55 4 One of the setups used in the Lambda Physik experiments is shown in Fig ...

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