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1.    ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF ... on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables ... Related Searches: ldu | a4003 | 193 nm laser

2.    Coherent_Combo Best match in this PDF  |  All matches in this PDF Annual Report, Proxy Statement & Notice of Annual Meeting 2004 In the highly sophisticated industry of photonics, Coherent, Inc. leads the way, offering reliability, cost and performance advantages for the widest range of commercial and scientific research applications. Founded in 1966, Coherent ... Related Searches: lpx | power meter model 210 | avia

3.  DUV Microlithography ... optical aberrations will result. The most effective way to produce sufficient energy at the narrow spectral content is by using an excimer laser. NovaLine Lithography Series NovaLine® lasers are setting new standards of performance, with stable, line-narrowed, 2 kHz operation at 248 nm (30 W semi line ... Related Searches: euv

4.    pdf_129 Best match in this PDF  |  All matches in this PDF Very recently we performed the first experiment utilizing velocity map imaging (VELMI) to study the reaction dynamics of the O(1 D) + D2 ---> OD + D system [3]. Despite the advantages of the crossed-beam imaging technique, there have been relatively few such studies'. Almost all have been performed ... Related Searches: water manifolds | edge isolation | heidelberg

5.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 2 OF 7) ... line narrowing optics. For this task Lambda Physik has developed a passive damping system, which comprises in the so-called LDU suspension. For the NovaLine A4003 laser the LDU suspension has been greatly improved in comparison to former models. Requirement for the LDU suspension is that it fixes the ... Related Searches: laser beam expander

6.    pdf_127 Best match in this PDF  |  All matches in this PDF A PUBLICATION BY LAMBDA PHYSIK · APRIL 2001 · No. 58 LAMBDA HIGHLIGHTS Surface Cleaning of Artwork Using 248 nm Laser Radiation Dr. Rianne Teule, Art Innovation, The Netherlands IN THIS ISSUE: · Surface Cleaning of Artwork Using 248 nm Laser Radiation Art Innovation offers a new, excimer later, cleaning ... Related Searches: bandpass filter | uv lasers | periscope | libs

7.    Coherent_accessible  (PAGE 18 OF 156) ... Series CO2 FAP family Semiconductor Graphic arts and display DUV lithography Computer-to-plate printing Writing data to master disks Entertainment NovaLine LithoTex Single-stripe diodes Fiber coupled diodes Diode bars Compass series Innova family AZURE Radius Innova family Viper Excimer Excimer Semiconductor ... Related Searches: laser cutting

8.    pdf_130 Best match in this PDF  |  All matches in this PDF The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ... Related Searches: dye laser | lambda physik dye | lpf 220i | scanmate

9.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 1 OF 7) ... on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL ) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables ... Related Searches: 193 nm laser | resonator

10.    ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 3 OF 7) ... .95 1.05 -5 -4 -3 -2 -1 0 1 2 3 4 5 Rel. Wavelength [pm] Norm. Intensity bandwidth: 0.26pm, FWHM spectral purity: 0.60pm, E95% Figure 3 Bandwidth of NovaLine A4003 For the NovaLine A4003 we completed a study on these purge gas parameter, which has lead to a new optimization of the purge gas system. With ...

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