1 - 10 of 20 Search Results for novaline
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1.
Highlights No. 60 | FINAL.QXP
(PAGE 10 OF 12)
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…
cm2
/pulse down to just a few µJ/cm2
/pulse
(Fig. 1).
This system uses a 2kHz broadband ArF
laser (Lambda-Physik NovaLine A2030) to
expose the samples. The exposure and
measurement system handles up to 20
samples at a time, exposing them to different
…
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4.
untitled
(PAGE 21 OF 136)
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…serve and the technologies upon which they are based.
Market Segment Application Products Technology
Microelectronics DUV lithography NovaLine
LithoTex
Excimer
Excimer
Photomask writing SabreFreD
Innova
NovaTex
Frequency doubled ion
Ion
Excimer…
Related Searches: tunable diode laser | viper
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6.
Draft
(PAGE 1 OF 7)
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…recent progress in the development of high repetition rate ultra-narrow band lasers for
high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables…
Related Searches: 193 nm laser
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7.
Draft
(PAGE 5 OF 7)
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…calibrates the wavelength of the monitoring scale. The hollow cathode lamp
gives reference to the atomic transition of iron at 193.4538 nm. For the NovaLine A4003 laser the wavelength and
bandwidth monitor system have been redesigned. The finesse of the monitoring optics has been increased to achieve…
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8.
Draft
(PAGE 3 OF 7)
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…Rel. Wavelength [pm]
Norm.Intensity
bandwidth: 0.26pm, FWHM
spectral purity: 0.60pm, E95%
Figure 3 Bandwidth of NovaLine A4003
For the NovaLine A4003 we completed a study on these purge gas parameter, which has lead to a new optimization
of the purge gas system. With this…
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9.
Draft
(PAGE 6 OF 7)
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…3000 3500
Pulse Counter [mio]
Bandwidth[pm]
Bandwidth, FWHM
Grat. Spectr., FWHM
Specification
Figure 8 Bandwidth of NovaLine A4003
The energy stability of the laser takes direct influence on achieving the accurate dose on the wafer. For the process it
is important…
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