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1 - 10 of 23 Search Results for novaline
Search Suggestions: 193 nm laser | 473 | scanmate 2 | dye laser | tunable dye laser | lpx | lambda physik | scanmate | narrow band | goettingen
1.  DUV Microlithography
... optical aberrations will result. The most effective way to produce sufficient energy at the narrow spectral content is by using an excimer laser. NovaLine Lithography Series NovaLine® lasers are setting new standards of performance, with stable, line-narrowed, 2 kHz operation at 248 nm (30 W semi line ...

2.  pdf document  pdf_130 Best match in this PDF  |  All matches in this PDF
The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A ...
Related Searches: 473 | scanmate 2 | dye laser | tunable dye laser

3.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF
... on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables ...
Related Searches: lambda physik | 193 nm laser

4.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 1 OF 7)
... on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL ) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables ...
Related Searches: 193 nm laser

5.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 2 OF 7)
... line narrowing optics. For this task Lambda Physik has developed a passive damping system, which comprises in the so-called LDU suspension. For the NovaLine A4003 laser the LDU suspension has been greatly improved in comparison to former models. Requirement for the LDU suspension is that it fixes the ...

6.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 3 OF 7)
... .95 1.05 -5 -4 -3 -2 -1 0 1 2 3 4 5 Rel. Wavelength [pm] Norm. Intensity bandwidth: 0.26pm, FWHM spectral purity: 0.60pm, E95% Figure 3 Bandwidth of NovaLine A4003 For the NovaLine A4003 we completed a study on these purge gas parameter, which has lead to a new optimization of the purge gas system. With ...

7.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 4 OF 7)
... over multi-billion laser pulses the influence of the optical modules and laser windows on the optical laser performance must get minimized. For the NovaLine A4003 we have addressed the laser windows. The windows not only see the highest energy density but also face pressure and temperature gradients ...

8.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 5 OF 7)
... calibrates the wavelength of the monitoring scale. The hollow cathode lamp gives reference to the atomic transition of iron at 193.4538 nm. For the NovaLine A4003 laser the wavelength and bandwidth monitor system have been redesigned. The finesse of the monitoring optics has been increased to achieve ...

9.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 6 OF 7)
... 0.40 0 500 1000 1500 2000 2500 3000 3500 Pulse Counter [mio] Bandwidth [pm] Bandwidth, FWHM Grat. Spectr., FWHM Specification Figure 8 Bandwidth of NovaLine A4003 The energy stability of the laser takes direct influence on achieving the accurate dose on the wafer. For the process it is important to ...

10.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 7 OF 7)
The dose stability of the NovaLine A4003 laser was measured to be 0.15% at the 1 billion test point and is found to be 0.20% at the 3 billion laser pulses test point which still present a high margin versus the specification limit. 4. CONCLUSION The NovaLine A4003 laser has been developed for 193 nm ...

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