Search
Superior Reliability & Performance

  • Lasers and Laser-based Systems
  • Laser Measurement and Control
  • Precision Optics
  • Related Accessories
1 - 10 of 10 Search Results for novaline 100

1pdf document  pdf 127 Best match in this PDF  |  All matches in this PDF
…High-purity N2 gas was used to purge the beam line, which was separated from the evacuated spectrograph by a MgF2 window. We took about 100 exposures of a NovaLine F1030 F2 laser using different gas fills, discharge voltages, and laser gas temperatures. The gas fills were composed of halogen gas (5%…
Related Searches: lamp | compex 102 | laser application in engineering field | lambda physik krf

2pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF
100 200 300 400 500 Signal Pixel Figure 5 Signal of standard monitor Figure 6 Signal of re-designed monitor A built-in hollow-cathode lamp routinely calibrates the wavelength of the monitoring scale. The hollow cathode lamp gives reference to the atomic transition of iron at 193.4538 nm. For the NovaLine
Related Searches: novaline | 193 nm laser | sergei | ldu

3pdf document  pdf 130 Best match in this PDF  |  All matches in this PDF
…silicon and fused silica. In Highlights No. 54 we reported about the first 157nm applications in DUV microlithography that achieved resolution in the sub-100 nm region. Since our last report, numerous new R&D projects have developed in Europe and the US. In February of this year Sematech sponsored the first…
Related Searches: laser heating | laser pdf | excimer pumped dye laser | lpx 210i

4pdf document  pdf 129 Best match in this PDF  |  All matches in this PDF
…Researchers Validate 157 nm Wavelength In October 1999 Lambda Physik hosted the Second International UV Laser Symposium for 157 nm Applications. Nearly 100 specialists gathered to discuss progress and applications using this VUV wavelength. From the wide range of applications it is clear that 157nm light…
Related Searches: uv optics | pinhole | lambda physik krf | laser application in engineering field

5Draft  (PAGE 4 OF 7)
NovaLine A4003 we have addressed the laser windows. The windows not
only see the highest energy density but also face pressure and temperature gradients, since they are in direct contact
with the gas. Contamination of the window surface presents another possible problem, which for the NovaLine

6pdf document  pdf 126 Best match in this PDF  |  All matches in this PDF
…interference maxima within the rhombus). From AFM profiles we find that the holes have a spacing of 805 ± 70nm, a width at FWHM of 160 ± 40nm and a depth of 100 ± 20nm. The large inaccuracies in these values and the irregular shape of holes can be related to the roughness and thickness variations of the PI foil…
Related Searches: coherence length | spatial filter | laser pdf | top hat profile

7Draft  (PAGE 3 OF 7)
…laser in combination with this excellent inherent
stability ensures wavelength stability of better than ± 0.03 pm for a moving average window of 100 laser pulses.
2.2 Optical Stability
Operation at 193nm wavelength requires careful selection of materials and perfect purging of the beam path…

8Highlights No. 60 | FINAL.QXP  (PAGE 10 OF 12)

cm2
/pulse down to just a few µJ/cm2
/pulse
(Fig. 1).
This system uses a 2kHz broadband ArF
laser (Lambda-Physik NovaLine A2030) to
expose the samples. The exposure and
measurement system handles up to 20
samples at a time, exposing them to different

Related Searches: novaline

9Draft  (PAGE 2 OF 7)
…narrowing optics. For this task Lambda Physik has
developed a passive damping system, which comprises in the so-called LDU suspension. For the NovaLine A4003
laser the LDU suspension has been greatly improved in comparison to former models. Requirement for the LDU
suspension is that it fixes…

10Highlights No. 58 V5for PDF.QXP  (PAGE 5 OF 12)
…was used to purge the beam line,
which was separated from the evacuated
spectrograph by a MgF2 window.
We took about 100 exposures of a
NovaLine F1030 F2 laser using different gas
fills, discharge voltages, and laser gas
temperatures. The gas fills were composed
of…




Site Search by  Site Search powered by SLI Systems
.