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1 - 10 of 25 Search Results for novatex
1.  pdf document  HighRep-RateExcimerLasersforMicromachingRev2 Best match in this PDF  |  All matches in this PDF
…deviation range. This behavior is called overshoot behavior. For sensitive applications this behavior in burst operation is not desired. Therefore the NOVATEX laser is equipped with the POWERLOK® software technology which allows to keep the leading pulses within the energy range, hence, to suppress the overshoot…
Related Searches: resonator | arf laser | excimer laser | krf laser

2.  pdf document  UCLD Catalog Customer 9 11 new Best match in this PDF  |  All matches in this PDF
…Evolution, Excistar, FAP, FreD, GEM, HighLight, Indigo, IndyStar, Innova, Legend, Libra, LPXPro, Mantis, Matrix, MBD, MBR, Micra, Mira, MotoFreD, Novatex, OPA, OPO, Paladin, Prisma, RegA, Sabre, Silhouette, StarC, Talisker, Verdi, VItesse, and Xantos are registered trademarks of Coherent, Inc. All other…
Related Searches: duv laser | coherence length | thyratron switch | micra ii

3.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 7 OF 9)
…voltage, i. e. the
beam parameters are kept constant.
3. SPECIFICATIONS
Table 2 shows the main specifications of the NOVATEX excimer laser.
NOVATEX ArF NOVATEX KrF
Wavelength 193 nm 248 nm
Max. stabilized energy 6 mJ 16 mJ
Max. stabilized power 6 W 16 W
Max. repetition…

4.  untitled  (PAGE 16 OF 136)
…lithography systems to make numerous copies of the pattern image on
semiconductor wafers. Our Innova Sabre and Innova SabreFreD ion lasers and our NovaTex excimer lasers are used
in laser systems for these applications.
Semiconductor inspection, metrology, test and repair
As semiconductor…
Related Searches: compass 315 | compass 415m

5.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 4 OF 9)
…stable in its position. Most stable beam performance is
possible if the laser resonator optics is decoupled from the discharge chamber. The NOVATEX laser employs purgeable
external resonator optics for high stability and long optics lifetime. Figure 4 shows the principle design of an external…
Related Searches: pointing stability

6.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 9 OF 9)
…throughput. Line narrowed lighography excimer lasers are not required for this job, therefore high-repetition rate
compact excimer lasers such as the NOVATEX can be used for optics testing.
Marking with flexible masks
Practically all materials can be marked in high quality with excimer lasers without…
Related Searches: lambda physik krf

7.  UCLD_Catalog.book  (PAGE 4 OF 37)
…........................... 1-19
Excistar XS/ Xantos Level-A Course (Operation) .................................................. 1-20
Novatex Level-A (Supervisor) Course (Operation2)............................................... 1-20
LS2000/LSX Level-A Course (Operation)...........…
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8.  UCLD_Catalog.book  (PAGE 30 OF 37)
…very helpful.
Novatex Level-A (Supervisor) Course (Operation2)
Schedule: Upon request Part #: 1100616 Course length: 2 days Tuition: $5,200.00 US
4.000,00
Day(s): Upon availability Begin: 9:00 AM End: 5:00 PM
Course Description: Maximum 4 trainees. The Novatex A-Level (Supervisor…

9.  UCLD_Catalog.book  (PAGE 33 OF 37)
…very helpful.
Novatex Level-B (OEM) Course (Maintenance)
Schedule: Upon request Part #: 1100616 Course length: 4-5 days Tuition: $10,400.00 US
8.000,00
Day(s): Upon availability Begin: 9:00 AM End: 5:00 PM
Course Description: Maximum 4 trainees. The Novatex B-Level (OEM) course…
Related Searches: thyratron

10.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 3 OF 9)
…shape. The homogeneous NOVATEX beam profile is shown in Figure 3, the long axis in vertical and the
short axis in horizontal direction. Specified size (v x h, FWHM) for ArF is 11 mm x 2.5 mm and for KrF 11 mm x 2
mm.
Figure 3: Typical beam profile of the NOVATEX excimer laser, typical…

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