…high power excimer lasers enables precise, high yield LLO, with fast processing speeds. The use of ceramic preionization, together with Coherent's NovaTube metal-ceramic tube technology, results in both long tube lifetime and excellent pulse-to-pulse stability at all excimer laser wavelengths. This delivers…
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Very recently we performed the first experiment utilizing velocity map imaging (VELMI) to study the reaction dynamics of the O(1 D) + D2 ---> OD + D system [3]. Despite the advantages of the crossed-beam imaging technique, there have been relatively few such studies'. Almost all have been performed…
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…pulse-to-pulse stability * Advanced internal gas purification system for extended operation of laser gas and tube windows * Single-phase operation * NovaTube metal-ceramic tube technology * Magnetic-Assist (MA) protection for extended thyratron lifetime * Small footprint * Service access from one side *…
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…gaussian shape. Laser Pulse Duration: As the outcome of its utterly compact design (605 x 304 x 450mm2 ) which is based on the correspondingly short NovaTube metal/ceramic laser tube length, the OPTex Pro pulse duration is about 2 to 3 times shorter than that of high pulse energy excimer lasers at a given…
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Display Backplane Crystallization The Excimer Laser Annealing (ELA) process is proving to be much more flexible and economical than previous techniques. Find the Laser Solution that Fits your Application Needs. Search Applications Notes Search by material and/or process. -- SELECT MATERIAL --…
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High-Repetition Rate Excimer Laser for Micromachining Ludolf Herbst*, Ingo Klaft, Thomas Wenzel, Ulrich Rebhan Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany ABSTRACT Excimer lasers are nowadays well established UV laser sources for the wide area of micromachining. Their…
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…effects of these mechanisms (e.g. dust) where they cannot be eliminated completely. The most dramatic advance was made with the introduction of the Novatube (an metal-ceramic technology) in 1994. Eliminating the use of plastics and any other organics in the plasma tube increased both the gas and tube lifetime…
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Pulsed Excimer Lasers for Thin Film Applications Ralph F. Delmdahl Lambda Physik AG, Hans-Böckler-Straße 12, D-37079 Göttingen, Germany E-mail: rdelmdahl@lambdaphysik.com ABSTRACT Ongoing progress in material research and processing industry is fueled to a large extent by the technique of pulsed…
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…Laser Presented Milestones and Roadmap 157nm Lasers · First Lambda Physik 157nm excimer laser in 1980 · Boost in gas lifetime and output power by NovaTube in ´95 · Single line operation in ´98 · 1 kHz repetition rate in ´99 · Current Products: NovaLine F500; 500 Hz 10 W LPF 220; 200 Hz, > 5 W OPTex…
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