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…more significant role: The price of an EUV scanner could be more than 40 million US dollars, while end-users expect pricing to be in the 20 million dollar range. This is a conflict that must be resolved before EUVL becomes integrated into chip production. According to the list of critical technical issues…
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2OPA 9400/9800 datasheet  (PAGE 2 OF 2)
…1976.
Coherent offers a limited warranty for all OPA 9400/9800s. Please
refer to the latest version of the Coherent, Inc., Laser Group Price
List for full details of this warranty coverage.
DIMENSIONS
OPA 9800/9850 OPA 9400/9450
Physical dimensions of Laser Head (L x W X H…
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