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Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…of up to 1000 dies in parallel with a single laser
shot.
sapphire
carrier
substrate with active matrix
attach temporary carrier
transfer dies to substrate
pitch
die size
de-bond sapphire wafer
RGB Epi Wafer with µLED µLED dies
LLO
LIFT…

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