rtp on Coherent inc.

What's your interest?

Shows & Conferences

Founded in 1966, Coherent, Inc. is a world leader in providing superior laser reliability and performance.

> Search

Search Coherent

Superior Reliability & Performance

1 - 7 of 7 Search Results for rtp

1. Mira-OPO
`...` All versions of the ring cavity configuration are also delivered optics to cover infrared operation. All bulk crystal versions of the Mira-OPO (KTP, RTP and CTA) are offered with either a choice of either basic or advanced diagnostics/control. For high visible power, the Mira-OPO is delivered in a ring `...` Related Searches: opo laser \| opo \| mira opo \| mira

2. NanoSJournal_0308_Nano_Fabrication	Best match in this PDF \| All matches in this PDF
`...` Nanoelectronic Fabrication Laser Activated Vapour Phase Processes The decoupled combination of an Excimer Laser with a rapid thermal processing (RTP) heater has proved to be an excellent method to reduce the total thermal budget in modern semiconduc tor processing. Figure 1: Dopand diffusion from a `...`

3. NanoSJournal_0308_Nano_Fabrication (PAGE 1 OF 2)
`...` Nanoelectronic Fabrication Laser Activated Vapour Phase Processes The decoupled combination of an Excimer Laser with a rapid thermal processing (RTP) heater has proved to be an excellent method to reduce the total thermal budget in modern semiconduc tor processing. Figure 1: Dopand diffusion from a `...`

4. NanoSJournal_0308_Nano_Fabrication (PAGE 2 OF 2)
Application Report © 2008 WileyVCH Verlag GmbH & Co. KGaA, Weinheim (Germany) NanoS01.0837 a rapid thermal processing (RTP) lamp heater is adapted to the chamber. This allows to adjust the substrate temperature precisely and with short heating ramp durations. This equipment was used to improve `...`

5. Laser_activated_vapour_phase_processes_for_nanoelectronic_fabrication (PAGE 2 OF 4)
`...` beam guide on the right hand side is the realized one. To provide the possibility of heating the substrate decoupled from the laser energy a RTP lamp heater is adapted to the chamber. This allows to adjust the substrate temperature precisely and with short heating ramp durations. Superior Reliability `...`

6. Laser_activated_vapour_phase_processes_for_nanoelectronic_fabrication (PAGE 3 OF 4)
`...` wafers showed a behavior similar to those expectable from defect free, i. e. ideal, layers. The decoupled combination of an Excimer Laser with an RTP heater has proved to be an excellent method to reduce the total thermal budget in modern semiconductor processing. The concept is suitable for many vapour `...`

7. Laser_activated_vapour_phase_processes_for_nanoelectronic_fabrication	Best match in this PDF \| All matches in this PDF
`...` beam guide on the right hand side is the realized one. To provide the possibility of heating the substrate decoupled from the laser energy a RTP lamp heater is adapted to the chamber. This allows to adjust the substrate temperature precisely and with short heating ramp durations. Superior Reliability `...`

Site Search by

Click the button below to send your comments about the website.