1 - 10 of 30 Search Results for sequential lateral solidification
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1.
300WXeClExcimerLaserAnnealingRev2
(PAGE 7 OF 8)
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... .7 Joule. With this target in mind MicroLas and Lambda Physik started to develop a higher output power XeCl laser based on the LAMBDA STEEL platform. Sequential Lateral Solidification Since conventional ELA has still limitations in regards to CMOS architecture compatibility there are investigations of ...
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3.
LTPSWhitePaperFinal_Oct28
(PAGE 4 OF 12)
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... crystallization technique was brought into mass production which has proved particularly useful for SOPs and AM OLEDs. This method is called 2-shot Sequential Lateral Solidification. Here the process is designed to grow the grains (crystals) in a lateral direction rather than the vertical direction ...
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5.
IMID_Korea_2004_17-4_SLS1Rev2
(PAGE 3 OF 3)
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... achieve high quality and throughput for the next generation of large AM-LCDs and OLED displays. In addition, a new recrystallization technology, the sequential lateral solidification, has now become available for use on an industrial scale. 6. References [1] J. Shida, "JSW FLX Series SLS Method ...
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6.
300WXeClExcimerLaserAnnealingRev2
(PAGE 8 OF 8)
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... et al., "Crystallization of a-Si Films by Excimer Laser Annealing Method", Japan Steel Works Technical Review, 1997 4. James S. Im: ,,Sequential Lateral Solidification", Phys. Stat. Sol. A 166, 1998, pp. 603 5. H.-J. Kahlert: "Creating Crystals", oe magazine, 11-2001 SPIE USE ...
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8.
ExcimerLaserSolutions
(PAGE 4 OF 8)
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... the performance of several types of high-resolution, highbrightness flat panel displays (FPDs). For both excimer laser annealing (ELA) and two-shot sequential lateral solidification (SLS) our lasers are used by all leading FPD manufacturers. Inkjet Nozzle Drilling To drill the array of tiny nozzles ...
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9.
Silicon Annealing with Eximer Lasers
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... , higher field effect mobility in the poly-silicon layer is required, this an even more elaborate crystallization technique must be employed. Sequential Lateral Solidification (SLS), a technique developed by James S. Im from Columbia University, seemed appropriate and MicroLas developed an industry compatible ...
Related Searches: excimer laser annealing | microlas | oled
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10.
pdf_119
(PAGE 1 OF 12)
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... be produced by the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films and spatially ...
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