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1 - 10 of 36 Search Results for sequential lateral solidification

1Coherent Inc. Silicon Annealing by Sequential Lateral Solidification SLS
…so that adjacent polysilicon lines are exactly overlapped yielding a continuous layer of laterally crystallized polysilicon. This technique is therefore referred to as two-shot sequential lateral solidification (2-shot SLS) Results: During crystallization the crystals grow from the solid silicon into…
Related Searches: sls | polysilicon annealing

2Coherent Inc. Display Backplane Crystallization
…field effect mobility in the poly-silicon layer is required, this an even more elaborate crystallization technique must be employed. Sequential Lateral Solidification (SLS), a technique developed by James S. Im from Columbia University, seemed appropriate and MicroLas developed an industry compatible…
Related Searches: oled | lcd | polysilicon annealing | display

3Coherent Inc. Excimer Lasers from 157 nm to 350 nm UV range.
…Lasers Lithography Mask Metrology with Fast UV Excimer Lasers Roll-to-Roll Circuit Patterning with UV Excimer Lasers Silicon Annealing by Sequential Lateral Solidification (SLS) Three-Dimensional Structuring with UV Excimer Lasers 3D Microstructuring Dermatological Treatment Display Backplane Crystallization…
Related Searches: 157 nm | tunable pulsed laser | tunable excimer laser | tunable uv laser

4pdf document  pdf 119 Best match in this PDF  |  All matches in this PDF
…the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films and spatially localized singlecrystal…
Related Searches: pulse duration extender | lpx 300 | dye laser | compex 150

5pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
300 W XeCl Excimer Laser Annealing and Sequential Lateral Solidification in Low Temperature Poly Silicon Technology Ludolf Herbst*a , Hans-Jürgen Kahlertb , Burkhard Fechnerc , Ulrich Rebhana , Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem…
Related Searches: lambda steel 1000 | halogen | excimer laser annealing | xecl

6COHR_AR2007  (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution.
Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification
Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is
polycrystalline…
Related Searches: solar cell scribing | paladin

7pdf document  IMID Korea 2004 17-4 SLS1Rev2 Best match in this PDF  |  All matches in this PDF
…production is sequential lateral solidification (SLS) [5]. Both technologies require high performance industrial excimer lasers and UV-optics. This paper introduces the LAMBDA STEEL 2000 excimer laser, the CrystaLas UV-optics, and the entire production system FLXTM (Flexible Lateral X(c)rystallization…
Related Searches: jsw | oled | presentation | sls

8COHR_AR2007  (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution.
Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification
Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is
polycrystalline…
Related Searches: solar cell cutting

9COHR_AR2007  (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution.
Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification
Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is
polycrystalline…

10300WXeClExcimerLaserAnnealingRev2.pdf  (PAGE 7 OF 8)

LAMBDA STEEL platform.
Sequential Lateral Solidification
Since conventional ELA has still limitations in regards to CMOS architecture compatibility there are investigations of
other annealing technologies ongoing. SLS, sequential lateral solidification, a technique developed by James…


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