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1 - 10 of 30 Search Results for sequential lateral solidification
Search Suggestions: thin film | excimer laser annealing | uv lasers | beam homogenizer | compex 201

1pdf document  300WXeClExcimerLaserAnnealingRev2  (PAGE 7 OF 8)
... .7 Joule. With this target in mind MicroLas and Lambda Physik started to develop a higher output power XeCl laser based on the LAMBDA STEEL platform. Sequential Lateral Solidification Since conventional ELA has still limitations in regards to CMOS architecture compatibility there are investigations of ...

2pdf document  pdf_119 Best match in this PDF  |  All matches in this PDF
... be produced by the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films and spatially ...
Related Searches: thin film | excimer laser annealing | uv lasers | beam homogenizer

3pdf document  LTPSWhitePaperFinal_Oct28  (PAGE 4 OF 12)
... crystallization technique was brought into mass production which has proved particularly useful for SOPs and AM OLEDs. This method is called 2-shot Sequential Lateral Solidification. Here the process is designed to grow the grains (crystals) in a lateral direction rather than the vertical direction ...

4pdf document  IMID_Korea_2004_17-4_SLS1Rev2 Best match in this PDF  |  All matches in this PDF
... of LTPS is excimer laser annealing (ELA) with line beam (LB) technology [4]. A new ELA technology which is now available for production is sequential lateral solidification (SLS) [5]. Both technologies require high performance industrial excimer lasers and UV-optics. This paper introduces the LAMBDA ...
Related Searches: beam homogenizer | excimer laser annealing | microlas | camera

5pdf document  IMID_Korea_2004_17-4_SLS1Rev2  (PAGE 3 OF 3)
... achieve high quality and throughput for the next generation of large AM-LCDs and OLED displays. In addition, a new recrystallization technology, the sequential lateral solidification, has now become available for use on an industrial scale. 6. References [1] J. Shida, "JSW FLX Series SLS Method ...

6pdf document  300WXeClExcimerLaserAnnealingRev2  (PAGE 8 OF 8)
... et al., "Crystallization of a-Si Films by Excimer Laser Annealing Method", Japan Steel Works Technical Review, 1997 4. James S. Im: ,,Sequential Lateral Solidification", Phys. Stat. Sol. A 166, 1998, pp. 603 5. H.-J. Kahlert: "Creating Crystals", oe magazine, 11-2001 SPIE USE ...

7pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
300 W XeCl Excimer Laser Annealing and Sequential Lateral Solidification in Low Temperature Poly Silicon Technology Ludolf Herbst*a , Hans-Jürgen Kahlertb , Burkhard Fechnerc , Ulrich Rebhana , Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem ...
Related Searches: excimer laser annealing | microlas | beam homogenizer | excimer laser technology

8pdf document  ExcimerLaserSolutions  (PAGE 4 OF 8)
... the performance of several types of high-resolution, highbrightness flat panel displays (FPDs). For both excimer laser annealing (ELA) and two-shot sequential lateral solidification (SLS) our lasers are used by all leading FPD manufacturers. Inkjet Nozzle Drilling To drill the array of tiny nozzles ...

9Silicon Annealing with Eximer Lasers
... , higher field effect mobility in the poly-silicon layer is required, this an even more elaborate crystallization technique must be employed. Sequential Lateral Solidification (SLS), a technique developed by James S. Im from Columbia University, seemed appropriate and MicroLas developed an industry compatible ...
Related Searches: excimer laser annealing | microlas | oled

10pdf document  pdf_119  (PAGE 1 OF 12)
... be produced by the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films and spatially ...


Search Suggestions: thin film | excimer laser annealing | uv lasers | beam homogenizer | compex 201
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