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1 - 10 of 36 Search Results for sequential lateral solidification

1. Coherent Inc. Silicon Annealing by Sequential Lateral Solidification SLS
…so that adjacent polysilicon lines are exactly overlapped yielding a continuous layer of laterally crystallized polysilicon. This technique is therefore referred to as two-shot sequential lateral solidification (2-shot SLS) Results: During crystallization the crystals grow from the solid silicon into… Related Searches: sls \| polysilicon annealing

2. Coherent Inc. Display Backplane Crystallization
…field effect mobility in the poly-silicon layer is required, this an even more elaborate crystallization technique must be employed. Sequential Lateral Solidification (SLS), a technique developed by James S. Im from Columbia University, seemed appropriate and MicroLas developed an industry compatible… Related Searches: oled \| lcd \| polysilicon annealing \| display

3. Coherent Inc. Excimer Lasers from 157 nm to 350 nm UV range.

…Lasers Lithography Mask Metrology with Fast UV Excimer Lasers Roll-to-Roll Circuit Patterning with UV Excimer Lasers Silicon Annealing by Sequential Lateral Solidification (SLS) Three-Dimensional Structuring with UV Excimer Lasers 3D Microstructuring Dermatological Treatment Display Backplane Crystallization…
Related Searches: 157 nm | tunable pulsed laser | tunable excimer laser | tunable uv laser

pdf 119

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…the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films and spatially localized singlecrystal…
Related Searches: pulse duration extender | lpx 300 | dye laser | compex 150

300WXeClExcimerLaserAnnealingRev2

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300 W XeCl Excimer Laser Annealing and Sequential Lateral Solidification in Low Temperature Poly Silicon Technology Ludolf Herbst*a , Hans-Jürgen Kahlertb , Burkhard Fechnerc , Ulrich Rebhana , Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem…
Related Searches: lambda steel 1000 | halogen | excimer laser annealing | xecl

6. COHR_AR2007 (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution. Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is polycrystalline… Related Searches: solar cell scribing \| paladin

7. IMID Korea 2004 17-4 SLS1Rev2	Best match in this PDF \| All matches in this PDF
…production is sequential lateral solidification (SLS) [5]. Both technologies require high performance industrial excimer lasers and UV-optics. This paper introduces the LAMBDA STEEL 2000 excimer laser, the CrystaLas UV-optics, and the entire production system FLXTM (Flexible Lateral X(c)rystallization… Related Searches: jsw \| oled \| presentation \| sls

8. COHR_AR2007 (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution. Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is polycrystalline… Related Searches: solar cell cutting

9. COHR_AR2007 (PAGE 92 OF 208)
…process speed, better yield, lower cost and/or superior display brightness and resolution. Excimer Laser Annealing ("ELA") and Sequential Lateral Solidification Several display types require a high-density pattern of silicon Thin Film Transistors ("TFTs"). If this silicon is polycrystalline…

10. 300WXeClExcimerLaserAnnealingRev2.pdf (PAGE 7 OF 8)
… LAMBDA STEEL platform. Sequential Lateral Solidification Since conventional ELA has still limitations in regards to CMOS architecture compatibility there are investigations of other annealing technologies ongoing. SLS, sequential lateral solidification, a technique developed by James…

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