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1.    ExcimerProductGuide2011 Best match in this PDF  |  All matches in this PDF …/500 200/500 Max. Pulse Energy (mJ) 2 8 12 5 Stabilized Pulse Energy (mJ) 1 5 8 4 Average Pulse Power1 0.2/0.5 1/2.5 1.6/4 0.8/2 Energy Stability1 (sigma, %) 2/3 2/3 2/3 2/3 Beam Dimensions (FWHM,V x H, mm2) 6 x 3 6 x 3 6 x 3 6 x 3 Beam Divergence (FWHM,V x H, mrad2) 3 x 1.5 3 x 1.5 3 x 1.5 3 x 1.5 Pulse… Related Searches: excimer manual | premix gas | krf laser | excimer laser

2.    LineBeam DS 0710 Best match in this PDF  |  All matches in this PDF …(±10) (±10) Homogeneity Long Axis (at 96% from mean value) Specification <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma Typical Value <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma Steepness short axis (µm) <_100 <_100 <_100 <_100 (90% to 10%), open slit Depth of focus… Related Searches: oled | homogenizer optics | pulse duration extender

3.    HighRep-RateExcimerLasersforMicromachingRev2 Best match in this PDF  |  All matches in this PDF …energy stability at 16 mJ in KrF operation is specified with < 2% Sigma. Figure 1 shows a run over 50 million pulses without a total laser gas exchange. The energy stability is nearly constant at a typical achieved value of 0.5% Sigma. Figure 1: Typical energy stability KrF over 50 million pulses 16… Related Searches: resonator | arf laser | excimer laser | krf laser

4.  IndyStar_DS  (PAGE 2 OF 2) … Homogeneity Long Axis (at 96% from mean value) Specification <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma Typical Value <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma Steepness short axis (µm) <_100 <_100 <_100 <_100 (90% to 10%), open slit…

5.  ExcimerProductGuide2008.qxd  (PAGE 37 OF 54) … Homogeneity Long Axis (at 96% from mean value) Specification <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma Typical Value <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma Steepness short axis (µm) <_100 <_100 <_100 <_100 (90% to 10%), open slit…

6.    ExciStarXS200500 DSrevA 0910 Best match in this PDF  |  All matches in this PDF …Hz E(U) 500 Hz Sigma(U) 200 Hz Sigma(U) 500 Hz High Voltage (V) PulseEnergy(mJ) EnergyStability(sigma,%) 0 4 8 12 16 20 700 800 900 1000 1100 1200 1300 1400 1500 0 1 2 3 4 5 6 E(U) 200 Hz E(U) 500 Hz Sigma(U) 200 Hz Sigma(U) 500 Hz High Voltage (V) PulseEnergy(mJ) EnergyStability(sigma,%) System Specifications… Related Searches: almeta | excistar 200 | excistar xs 200

7.  ExciStarXS_200&500_DS  (PAGE 2 OF 2) … Sigma(U) 200 Hz Sigma(U) 500 Hz High Voltage (V) PulseEnergy(mJ) EnergyStability(sigma,%) 0 4 8 12 16 20 700 800 900 1000 1100 1200 1300 1400 1500 0 1 2 3 4 5 6 E(U) 200 Hz E(U) 500 Hz Sigma(U)… Related Searches: excistar 200

8.    300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF …deviation over a 40 million pulses run is shown in Figure 2. The LAMBDA STEEL 1000 energy deviation is specified with Sigma < 2.5%, however, usually the average deviation is below 1 % (1 Sigma). SPIE USE, V. 2 5004-10 (p.2 of 8) / Color: No / Format: A4/ AF: A4 / Date: 2002-12-23 08:08:15 Please verify that… Related Searches: silicon annealing | annealing | excimer laser annealing | ludolf herbst

9.    Paper LPM2004Rev2 Best match in this PDF  |  All matches in this PDF …energy stability of a COMPex with smooth ceramic preionization measured over 1000 laser pulses at a wavelength of 248 nm. A typical standard deviation sigma of ca. 1 % is achieved at high pulse energies. 3.2 Beam Homogeneity Excimer lasers have typically a rectangular beam profile, whereas the long axis… Related Searches: halogen | ceramic | excimer gas | compex

10.  HighRep-RateExcimerLasersforMicromachingRev2.pdf  (PAGE 4 OF 9) …stability of the NOVATEX is specified with < 100 µrad Sigma. Figure 5 shows a typical beam pointing stability of 16 µrad Sigma. In Figure 6 the beam position stability is shown. The specification is < 150 µm, however, a value of < 5 µm Sigma in both horizontal and vertical could be achieved… Related Searches: pointing stability

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