…approach promises to challenge e-beam mask writing more directly (see Figure 2). This technique uses a 248 nm excimer laser to illuminate a spatiallightmodulator. This is a device that can display a programmable pattern; similar devices are commonly used in computer and television projector displays…
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…technology called "Multiphoton Intrapulse Interference Phase Scan", in short MIIPS, Figure 1: Typical setup of a pulse shaper with a SLM (SpatialLightModulator). The various frequency components of the pulse are separated through a dispersive element and collimated through a lens. The characteristics…
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…watts of output power in the ultraviolet (UV). An alternative LDI approach is based on a spatiallightmodulator (SLM). This is a device that imposes some form of spatially varying modulation on a beam of light. SLMs are commonly found in data projectors and projection televisions. In this embodiment…
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…characteristics required for advanced uV micromachining applications. in conclusion, high power uV excimer laser light is a unique and useful tool for a wide variety of processing tasks which require high spatial resolution and minimal thermal damage to surrounding material. As the applications for uV lasers diversify…
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…laser head is absorbed by the vanadate gain media inside the laser head. The crystal is kept at a stable temperature by TEC modules. The energy that is not converted into laser light is guided as heat to the baseplate of the laser. Additional heat is generated inside the laser by the ovens containing the…
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…means, that changing a pattern always requires cumbersome mechanical exchange of the mask. On the contrary, reflective masks on the basis of spatiallightmodulation (SLM) consisting of micro mirror devices (figure 7) are apt to combine the effects of a parallel process speed and a virtually unlimited manifold…
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…which means a shorter wavelength results in a higher spatial resolution. Secondly, UV photons deliver a higher energy than the photons of light with longer wavelengths. As a result, exposure times are reduced when working with photoresists or other light-sensitive media and the signal to noise ratio of detection…
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